With the rising integration levels used to increase digital processing performance, there is a clear need for multiple independent on-chip supplies in order to support per-IP or block power management. Simply adding multiple off-chip DC-DC converters is not only difficult due to supply impedance concerns, but also adds cost to the platform by increasing motherboard size and package complexity. There is therefore a strong motivation to integrate voltage conversion blocks on the silicon chip.The key challenge associated with realizing such integrated converters is achieving high efficiency at the high power densities required by high-performance digital logic. In typical CMOS processes, on-die capacitors have significantly higher Q and energy density and lower cost than on-die inductors, leading to several recent efforts in exploring fully integrated switched-capacitor (SC) DC-DC converters. For example, both [1] and [2] investigated interleaving to reduce the output ripple of fully integrated SC voltage doublers, with [1] demonstrating high efficiency (82%), and [2] showing high power density (~0.5-1.1W/mm 2 ). In this paper, we expand upon these previous designs by demonstrating a fully integrated step-down SC converter capable of achieving high efficiency (81%) at high power density (0.55W/mm 2 ) while supporting a wide range of output voltage levels.Careful analysis of the 4 major loss components of integrated SC converters (Fig. 10.8.1a) is critical to optimizing converter design parameters (particularly switching frequency, f sw ) and hence achieving high efficiency and power density. At low power density, efficiency is largely set by stray capacitance (bottom/top plate), while at high power density, efficiency is set by flying capacitor density and switch speed. Since the converter is targeted at digital loads, it is important to recognize that the minimum output voltage V min sets the performance of the digital blocks . Therefore, the increased load current caused by the converter's output ripple should be included as additional loss [3]. Fortunately, interleaving reduces ripple without impacting V min , and is thus effective in mitigating this loss.As shown in Fig. 10.8.1b, in order to enable variable conversion ratios while maintaining efficiency, the converter is partitioned into multiple standard cells, each consisting of 1 flying capacitor and 5 switches. Conceptually, each standard cell can be configured to operate in series or in parallel with the rest of the cells, leading to a simple physical design strategy that supports variable converter topology. In this demonstration, we group 2 standard cells in a converter unit supporting 3 topologies with conversion ratios of 2/3, 1/2, and 1/3 (1.33V, 1V, and 0.66V with a 2V input). Intermediate voltage levels are generated by controlling f sw and thus the output impedance of the converter [4], which is equivalent to linear regulation off of the ideal voltage.Each converter unit operates in 2 non-overlapping clock phases c1 and c2 (Fig. 10.8.2) with contr...