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LPDs, and {111} facets after a 10 mm treatment in boiling water is observed by AFM, light scattering, and MIR-FTIR measurements. This anisotropic etching is found to be suppressed by decreasing OW concentration. A treatment in HC1-spiked boiling water yields a surface which is comparable with that for room temperature water treatment.

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Electrode osited magnetic materials are of great interest in surface micromachining, as they can be used for transformation of L e s in both actuators and sensors. Magnetic alloys of the ferrous metal family with different characteristics can readily be electrodeposited. An advanced lithographic process was performed in order to generate resist molds for electrodeposition. By means of standard ultraviolet aligners and immersion development, photoresist layers up to 80 pm were patterned in a single shot. Repeated exposure and development were successfully used for structuring thicker resist layers. Hi h aspect ratios and steep edges were achieved with a sufficiently high resolution. The resulting resist patterns were molfed via electroplating. For microsystem applications, magnetic alloys such as NiFe and NiCo are of special interest. The deposited material was characterized in relation to its mechanical and magnetical properties. Some examples of microsystem components using magnetic properties are given. The active part of a magnetically driven microvalve containing a membrane with integrated force amplifier from NiFe alloy as well as a microturbine with NiCo rotator were fabricated and tested.

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A new fabrication process for the generation of 3D microstructures is presented. On the base of electrodeposition, microstructures of different three-dimensional shape could be formed without using moulds. This method can be applied for realising new components for surface micro machining. Furthermore, it can be used as an add-on process to almost all process technologies and it make use of standard equipment. Also presented is a calculation of linearly increasing structures by the example of wedge shaped plans. The main idea of the new techno'ogy is the controlled overplating of patterned plating base sequences.