Wafer-scale micro-optics replication technology

Rossi, Markus; Rudmann, Hartmut; Marty, B.; Maciossek, A.

doi:10.1117/12.507769

Cited by 21 publications

(14 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Although a manual intervention was required to glue the lenses, our multichannel objective can be replicated using moulding technology. Furthermore, in state-of-the-art facilities, lenses of the required dimension can be fabricated at the wafer level using the reflow technique, 14,15 enabling cheap production.…”

Section: Resultsmentioning

confidence: 99%

“…[10][11][12] Multichannel systems offer many design possibilities, each obtained by weighting differently the numerous design constraints. In our work, 13 we aim at a system with two main properties: the optics has to be simple for easy fabrication using wafer-level mass production [14][15][16] and its size has to be adequate to potentially achieve good angular resolution without resorting to superresolution techniques. We opted for a simple plano-convex design with lenses having a diameter of 1.0 mm.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Field curvature correction in multichannel miniature imaging systems suited for wafer-level production

et al. 2013

Self Cite

View full text Add to dashboard Cite

Abstract. Using multiple optical channels increases the number of design possibilities for the objectives of mobile imaging devices. For easy waferlevel fabrication, we start from a single optical element-a monocentric plano-convex lens. The quality of the areal image is used to select the size of the field of each channel. Each channel optics is axially positioned to reduce the effect of the image field curvature. The resulting device has a small number of channels and it images a full field of view of AE40 deg with an f -number of 3. Details of the optical design, of the fabrication process, and of the device performance are reported. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Field curvature correction in multichannel miniature imaging systems suited for wafer-level production

et al. 2013

Self Cite

View full text Add to dashboard Cite

show abstract

“…The microlens wafers are then mounted by wafer-level packaging (WLP) to wafer-level optics modules [60] ( Figure 37 ).…”

Section: Wafer-scale Imprint Technologiesmentioning

confidence: 99%

Wafer-scale micro-optics fabrication

Voelkel

2012

Advanced Optical Technologies

View full text Add to dashboard Cite

Micro-optics is an indispensable key enabling technology for many products and applications today. Probably the most prestigious examples are the diffractive light shaping elements used in high-end DUV lithography steppers. Highly-effi cient refractive and diffractive micro-optical elements are used for precise beam and pupil shaping. Micro-optics had a major impact on the reduction of aberrations and diffraction effects in projection lithography, allowing a resolution enhancement from 250 nm to 45 nm within the past decade. Micro-optics also plays a decisive role in medical devices (endoscopes, ophthalmology), in all laser-based devices and fi ber communication networks, bringing high-speed internet to our homes. Even our modern smart phones contain a variety of micro-optical elements. For example, LED fl ash light shaping elements, the secondary camera, ambient light and proximity sensors. Wherever light is involved, micro-optics offers the chance to further miniaturize a device, to improve its performance, or to reduce manufacturing and packaging costs. Wafer-scale micro-optics fabrication is based on technology established by the semiconductor industry. Thousands of components are fabricated in parallel on a wafer. This review paper recapitulates major steps and inventions in wafer-scale micro-optics technology. The state-of-the-art of fabrication, testing and packaging technology is summarized.

show abstract

“…Parallel fabrication is especially useful in cases of miniaturized systems because one can obtain a high number of chips from a wafer and in cases where several structural layers have to be aligned to each other. Thus, similar wafer-level concepts were introduced and optimized in recent years for the fabrication of miniaturized cameras [3][4][5]. However, the technological and application potential of wafer-level miniaturized optics is not restricted to miniature camera lenses.…”

Section: Introductionmentioning

confidence: 99%

Wafer-Level Hybrid Integration of Complex Micro-Optical Modules

et al. 2014

View full text Add to dashboard Cite

A series of technological steps concentrating around photolithography and UV polymer on glass replication in a mask-aligner that allow for the cost-effective generation of rather complex micro-optical systems on the wafer level are discussed. In this approach, optical functional surfaces are aligned to each other and stacked on top of each other at a desired axial distance. They can consist of lenses, achromatic doublets, regular or chirped lens arrays, diffractive elements, apertures, filter structures, reflecting layers, polarizers, etc. The suitability of the separated modules in certain imaging and non-imaging applications will be shown.

show abstract

Wafer-scale micro-optics replication technology

Cited by 21 publications

References 0 publications

Field curvature correction in multichannel miniature imaging systems suited for wafer-level production

Field curvature correction in multichannel miniature imaging systems suited for wafer-level production

Wafer-scale micro-optics fabrication

Wafer-Level Hybrid Integration of Complex Micro-Optical Modules

Contact Info

Product

Resources

About