Magnetically driven microstructures fabricated with multilayer electroplating

Löchel, Bernd; Maciossek, A.; Quenzer, Hans-Joachim; Wagner, B.; Engelmann, G.

doi:10.1016/0924-4247(94)00870-n

Cited by 35 publications

(20 citation statements)

References 9 publications

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“…Ni electroforming has been used in LIGA (or LIGA-like) extensively in the previous studies [4,[19][20][21][22][23][24]. Only a few studies have discussed about Ni-Fe alloys electroforming in LIGA (or LIGA-like) [5,7,25,26]. A relatively small number of investigations have measured and reported values for the Young's modulus, surface roughness and hardness of LIGA (or LIGA-like) Ni-Fe microcomponent [27,28].…”

Section: Introductionmentioning

confidence: 99%

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Nanomechanical properties of nanocrystalline Ni–Fe mold insert

Yeh

Fang

2004

Journal of Alloys and Compounds

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Section: Introductionmentioning

confidence: 99%

“…Hence, microelectroforming is an important process in microfabrication. Many materials for LIGA (or LIGA-like) have been investigated [4][5][6][7][8][9][10]. Among them, many new metals and alloy materials such as Au, Cu, Ni and Ni-Fe are able to been used to manufacture microelectroforming applications.…”

Section: Introductionmentioning

confidence: 99%

Nanomechanical properties of nanocrystalline Ni–Fe mold insert

Yeh

Fang

2004

Journal of Alloys and Compounds

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“…Laser-assisted polymerizatron enables the fabrication of patterned microstructures of polymers [ 139 ] . Stereolithography, based on laserassisted processing, can be used to fabricate three-dimensional microstructures [r40-1421 LIGA (Lithography, Electroforming, Molding) [143,144] is a technique that combines X-ray (or synchrotron) lithography electroplating, and molding for fabricating microstructures with high aspect ratios and relatively large feature sizes (-10 pm). Although the standard equipment for UV exposure can be adapted for this application, special optics and alignment systems are needed for structures thicker than 200 pm.…”

Section: Molding Of Organic Polymersmentioning

confidence: 99%

Microfabrication, Microstructures and Microsystems

Qin

Xia

Rogers

et al. 1998

Topics in Current Chemistry

135

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This review gives a brief introduction to materials and techniques used for microfabrication. Rigid materials have typically been used to fabricate microstructures and systems. Elastomeric materials are becoming attractive, and may have advantages for certain types of applications. Photolithography is the most commonly used technique for the fabrication of structures for microelectronic circuits, microelectromechanical systems, microanalytical devices and micro-optics. Soft lithography represents a set of non-photolithographic techniques: it forms micropatterns of self-assembled monolayers (SAMs) by contact printing and generates microstructures of polymers by contact molding. The aim of this paper is to illustrate how non-traditional materials and methods for fabrication can yield simple, cost-effective routes to microsystems, and now they can expand the capabilities of these systems.

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“…Novolak-type photoresists enable a layer thickness of up to 100 µm to be reached in a single layer process and 200 µm in a multilayer process with an aspect ratio of up to 10 [5][6][7]. Thick, high aspect ratio SU-8 structures with layer thicknesses over 200 µm can only be produced in a protracted multilayer process, with fabrication times of over 1 h per 100 µm [8,9] or by using an optimized process cycle with lower baking temperatures [10].…”

Section: Introductionmentioning

confidence: 99%

Acrylated hyperbranched polymer photoresist for ultra-thick and low-stress high aspect ratio micropatterns

Schmidt¹,

Yi²,

Jin³

et al. 2008

J. Micromech. Microeng.

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Different photocurable acrylates, including two hyperbranched monomers, are compared with an epoxy negative-tone photoresist (SU-8) with respect to their suitability for the fabrication of ultra-thick polymer microstructures in a photolithographic process. To this end, a resolution pattern was used and key parameters, such as the maximum attainable thickness and aspect ratio, the minimum resolution and the processing time were determined. Compared to SU-8, all acrylate materials allowed the fabrication of thicker layers with a fast single layer fabrication procedure. Microstructures with thicknesses of up to 850 µm, an aspect ratio of up to 7.7, a 5.5-fold reduction in internal stress and a 6-fold reduction in processing time compared to SU-8 were demonstrated using an acrylated hyperbranched polyether. The specific development process of the hyperbranched polymer combined with channel design moreover enabled us to produce a high-performance valve for micro-battery devices.

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Magnetically driven microstructures fabricated with multilayer electroplating

Cited by 35 publications

References 9 publications

Nanomechanical properties of nanocrystalline Ni–Fe mold insert

Nanomechanical properties of nanocrystalline Ni–Fe mold insert

Microfabrication, Microstructures and Microsystems

Acrylated hyperbranched polymer photoresist for ultra-thick and low-stress high aspect ratio micropatterns

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