1998
DOI: 10.1007/3-540-69544-3_1
|View full text |Cite
|
Sign up to set email alerts
|

Microfabrication, Microstructures and Microsystems

Abstract: This review gives a brief introduction to materials and techniques used for microfabrication. Rigid materials have typically been used to fabricate microstructures and systems. Elastomeric materials are becoming attractive, and may have advantages for certain types of applications. Photolithography is the most commonly used technique for the fabrication of structures for microelectronic circuits, microelectromechanical systems, microanalytical devices and micro-optics. Soft lithography represents a set of non-… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
94
0
1

Year Published

1999
1999
2016
2016

Publication Types

Select...
7

Relationship

4
3

Authors

Journals

citations
Cited by 135 publications
(98 citation statements)
references
References 124 publications
0
94
0
1
Order By: Relevance
“…Most methods for 3D microfabrication are based on photolithography (30,64). A number of techniques (some very clever but none very simple or easily extended to the parallel fabrication of very large numbers of components) have been used to convert 100-m-scale two-dimensional structures produced by photolithography into 3D structures (65)(66)(67)(68). The most versatile of these at present seems to be self-folding, which is another form of self-assembly.…”
Section: Components For Self-assemblymentioning
confidence: 99%
“…Most methods for 3D microfabrication are based on photolithography (30,64). A number of techniques (some very clever but none very simple or easily extended to the parallel fabrication of very large numbers of components) have been used to convert 100-m-scale two-dimensional structures produced by photolithography into 3D structures (65)(66)(67)(68). The most versatile of these at present seems to be self-folding, which is another form of self-assembly.…”
Section: Components For Self-assemblymentioning
confidence: 99%
“…Our approach to the fabrication of microfluidic devices is based primarily on the techniques of soft lithography [2,46,47], specifically rapid prototyping and replica molding. Soft lithography is a suite of nonphotolithographic methods for replicating a pattern.…”
Section: Soft Lithographymentioning
confidence: 99%
“…Microfabrication of increasingly complex separation devices on chips that are ever smaller is currently revolutionizing the area of chemical and biological analysis [1,2]. Analytical microchips are expected to allow substantial miniaturization and acceleration of a wide variety of analytical procedures, facilitating their combinations, and eventually leading to efficient ªmicro total analytical systemsº (mTAS) [3].…”
Section: Introductionmentioning
confidence: 99%