Ultraviolet Depth Lithography and Galvanoforming for Micromachining

Löchel, Bernd; Maciossek, A.; Quenzer, Hans-Joachim; Wagner, Bernhard

doi:10.1149/1.1836415

Cited by 46 publications

(19 citation statements)

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“…During the last decades the number of commercial applications is still continuously increasing. By example, photopolymer applications are found in electronic materials [14], printing materials [15], optical and electro-optical materials [16–17], fabrication of devices and materials [18], adhesives and sealants [19], coatings [20] and surface modifications [21–22]. …”

Section: Introductionmentioning

confidence: 99%

Tailoring of organic dyes with oxidoreductive compounds to obtain photocyclic radical generator systems exhibiting photocatalytic behavior

Ley¹,

Christmann²,

Ibrahim³

et al. 2014

Beilstein J. Org. Chem.

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SummaryThe combination of a dye which absorbs the photon, an electron acceptor and an electron donor leading to energy conversion through electron transfer, was the basis of the so called three-component systems. In this paper, an experimental work combining Rose bengal dye with a triazine derivative as electron acceptor and ethyl 4-(dimethylamino)benzoate as electron donor, will underline the benefit of the photocyclic behavior of three-component systems leading to the dye regeneration. A thermodynamic approach of the photocycle is presented, followed by a mechanistic and computational study of ideal photocycles, in order to outline the specific kinetics occuring in so called photocatalytic systems. The simple kinetic model used is enough to outline the benefit of the cyclic system and to give the basic requirements in term of chemical combination needed to be fulfilled in order to obtain a photocatalytic behavior.

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Section: Introductionmentioning

confidence: 99%

Tailoring of organic dyes with oxidoreductive compounds to obtain photocyclic radical generator systems exhibiting photocatalytic behavior

Ley¹,

Christmann²,

Ibrahim³

et al. 2014

Beilstein J. Org. Chem.

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“…Some research into alternative materials has begun, e.g., a NiCo alloy of 79/21 has been reported with relative permeability of 19.4. 13 Another alloy that has been reported in the literature is NiFeMo. 14,15 The original bath was reported in 1965, 14 and only investigated films up to hundreds of angstroms in thickness.…”

mentioning

confidence: 99%

A NiFeMo Electroplating Bath for Micromachined Structures

Taylor

Schneider

Baltes

et al. 1999

Electrochem. Solid-State Lett.

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A number of micromachined magnetic sensors and actuators require materials with desirable magnetic properties such as high permeability and thicknesses in the range of several micrometers. Materials with appropriate magnetic properties have been reported for magnetic storage applications, but often in thickness ranges insufficient for micromachined sensors and actuators. We report the results of an electroplating bath for the deposition of a high permeability, low coercivity material, a NiFeMo alloy. Using this bath, the NiFeMo alloy may be electrodeposited up to 5 µm in thickness. The residual stress of the electroplated NiFeMo material remains larger than that for NiFe (Permalloy) electrodeposits.

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“…It should be noted that although the above example shows the ability of synthesis of unidirectionally aligned uniformly sized PZT nanorod arrays, sol electrophoretic deposition can be easily combined with deep X-ray Lithography [49,50] and soft lithography [51,52] to create various desired PZT patterns in both micro-and meso-scales. With sol electrophoretic deposition, the feature size of a pattern can be as small as a few tens nanometers and the aspect ratio can be at least above 1000.…”

Section: Unidirectional Nanorodsmentioning

confidence: 99%