Focused-ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology for forming three-dimensional nanostructures. Various diamond-like-carbon (DLC) free-space-wirings have been demonstrated by FIB-CVD using a computer-controlled pattern generator, which is a commercially available pattern generator for electron-beam (EB) lithography. The material composition and crystal structure of DLC free-space-wiring were studied by transmission-electron microscopy and energy-dispersive x-ray spectroscopy. As a result, it became clear that DLC free-space-wiring is amorphous carbon containing a Ga core in the wire. Furthermore, the electrical resistivity measurement of DLC free-space-wiring was carried out by two terminal electrodes. Au electrodes were fabricated by EB lithography and a lift-off process. The electrical resistivity was about 100 Ω cm at room temperature.

We studied the fabrication of free-designed three-dimensional (3D) structures by using focused-ion-beam chemical-vapor deposition. The 3D structures are fabricated by scanning 30 keV Ga+ ion-beam-assisted deposition in a 1×10−4 Pa phenanthrene atmosphere. The scanning pattern and blanking signal of the ion beam are generated by a 3D computer-aided-designed model using a computer pattern-generating system. This 3D pattern-generating system is able to fabricate overhang and hollow structures by setting suitable parameters (for example, plot pitch, dwell time, time interval of irradiations, and priorities of scanning). In this article, we demonstrate the performance of a 3D pattern-generating system by fabricating a 1:100 000 000 scale model of the Enterprise spaceship, a microring, a moth’s eyelike structure, and a morpho butterflylike structure with 200 nm spacing.

Three-dimensional (3D) nanostructures on a glass capillary have a number of useful applications such as manipulators, actuators, and sensors in the various microstructures. We observed a phenomenon that two diamondlike-carbon pillars on a tip of glass capillary fabricated by 30 keV Ga+ focused-ion-beam-chemical vapor deposition (FIB-CVD) with a precursor of phenanthrene vapor was able to work as a manipulator during FIB irradiation. It became clear that it was caused by electronic charge repulsion between two pillars, which accumulated electric charge by FIB irradiation. By applying this moving mechanism, we have developed a 3D nanomanipulator and actuator on a tip of glass capillary by FIB-CVD. Furthermore, in situ observations of movement for a 3D nanomanipulator and actuator have been demonstrated by applying voltage onto a Au-coated glass capillary.

Three-dimensional nanostructures on a glass capillary have a number of useful applications such as manipulators and sensors in the various microstructures. This time, we have demonstrated the fabrication of a nozzle nanostructure on a glass capillary for a bio injector by 30 keV Ga þ focused-ion-beam assisted deposition with a precursor of phenanthrene vapor and etching. It has been demonstrated that nozzle nanostructures with various shapes and sizes have been successfully fabricated. An inner tip diameter of 30 nm on a glass capillary and a tip shape with an inclined angle have been realized.

Development of a laser-focused ion beam combination machinea) Rev. Sci. Instrum. 81, 02B702 (2010); 10.1063/1.3258427Three-dimensional and multimaterial microfabrication using focused-ion-beam chemical-vapor deposition and its application to processing nerve electrodes

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Three-dimensional diamond-like carbon (DLC) mold fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) using a precursor of phenanthrene has been applied to a nanoimprint process. Various 3D nanostructure DLC molds have been delineated by FIB-CVD using a computer-controlled pattern generator which is a commercially available pattern generator for electron beam lithography. Then, the molds were imprinted into hydrogen silsequioxane (HSQ) as a material replicated at room temperature. It was confirmed that the 3D mold, after nanoimprint lithography (NIL), kept its original shape, and 3D mold structures were successfully imprinted into HSQ. These results reveal that the 3D mold fabricated by FIB-CVD can be applied to NIL.

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