Development of three-dimensional pattern-generating system for focused-ion-beam chemical-vapor deposition

Abstract

We studied the fabrication of free-designed three-dimensional (3D) structures by using focused-ion-beam chemical-vapor deposition. The 3D structures are fabricated by scanning 30 keV Ga+ ion-beam-assisted deposition in a 1×10−4 Pa phenanthrene atmosphere. The scanning pattern and blanking signal of the ion beam are generated by a 3D computer-aided-designed model using a computer pattern-generating system. This 3D pattern-generating system is able to fabricate overhang and hollow structures by setting suitable parameters (for example, plot pitch, dwell time, time interval of irradiations, and priorities of scanning). In this article, we demonstrate the performance of a 3D pattern-generating system by fabricating a 1:100 000 000 scale model of the Enterprise spaceship, a microring, a moth’s eyelike structure, and a morpho butterflylike structure with 200 nm spacing.

Influence of Heat Treatment on Mechanical Properties of DLC Deposited by FIB-CVD

“…Kometani et al reported fabricating nanomanipulator and actuator (13) , and T. Hoshino et al demonstrated performance of FIB-CVD method by fabricating a moth's eyelike structure and a morpho butterfly-like structure with using this method (14) . In view of practical application of the technology, it is important to understand influence of heat treatment on the mechanical properties and microstructures of DLC deposited by FIB-CVD.…”

Cell wall cutting tool and nano-net fabrication by FIB-CVD for subcellular operations and analysis

“…A computer pattern generator (CPG) system was added to the FIB apparatus so that any pattern could be drawn. Beam scanning and blanking could be controlled with the CPG [9].…”

Large area nanofabrication of butterfly wing's three dimensional ultrastructures

“…21 Hoshino et al and Watanabe et al demonstrated the fabrication of Morpho butterfly wing scale tree like ultrastructures by using FIB equipped with chemical vapor deposition (FIB-CVD). 22,23 Their work has been regarded as a proof that even most complex photonic structures in nature can be mimicked by human made technology. 2 However, the technological application of such structures is very limited because FIB method is very time consuming and expensive so that only micron size area can be covered in several hours.…”