Nanomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical vapor deposition

Abstract

Three-dimensional (3D) nanostructures on a glass capillary have a number of useful applications such as manipulators, actuators, and sensors in the various microstructures. We observed a phenomenon that two diamondlike-carbon pillars on a tip of glass capillary fabricated by 30 keV Ga+ focused-ion-beam-chemical vapor deposition (FIB-CVD) with a precursor of phenanthrene vapor was able to work as a manipulator during FIB irradiation. It became clear that it was caused by electronic charge repulsion between two pillars, which accumulated electric charge by FIB irradiation. By applying this moving mechanism, we have developed a 3D nanomanipulator and actuator on a tip of glass capillary by FIB-CVD. Furthermore, in situ observations of movement for a 3D nanomanipulator and actuator have been demonstrated by applying voltage onto a Au-coated glass capillary.

Influence of Heat Treatment on Mechanical Properties of DLC Deposited by FIB-CVD

“…Kometani et al reported fabricating nanomanipulator and actuator (13) , and T. Hoshino et al demonstrated performance of FIB-CVD method by fabricating a moth's eyelike structure and a morpho butterfly-like structure with using this method (14) . In view of practical application of the technology, it is important to understand influence of heat treatment on the mechanical properties and microstructures of DLC deposited by FIB-CVD.…”

Monolithic Integration of Silicon Nanowires With a Microgripper

“…Any misplacement of NWs might lead to possible short circuits rendering the microgripper useless. Hence, NW attachment to grippers is usually carried out by careful focused-ion-beam [18] or e-beam-induced deposition [19] instead of self-assembly. In this section, the challenge of employing NWs as functional structures on a microsystem will be addressed.…”

Focused ion beam assisted deposition of nanostructures at elevated substrate temperatures

“…In the recent years, the focused ion beam (FIB) technology has proven itself to be a very convenient tool for rapid fabrication of prototype nano/micro electro mechanical systems (NEMS/MEMS) [1,2], actuators [3] and nano/micro sensors [4]. The focused ion beam chemical vapor deposition (FIB-CVD) process has been extensively utilized for the fabrication of prototype 2-D/3-D nanostructures such as nanopillars, cantilevers, tubes and hollow pyramids etc [5].…”