A gallium nitride (GaN) junction barrier Schottky (JBS) diode with trenched p-GaN region on a GaN substrate is presented. A threshold voltage of the GaN JBS diode is 0.8 V that is the same as a conventional GaN Schottky barrier diode (SBD). A specific differential on-resistance of the GaN JBS diode is 1.5 mΩ · cm 2 up to 4.5 V, above which it decreases with 0.9 mΩ · cm 2. A forward current of the GaN JBS diode at 10 V is 8.7 kA / cm 2 that is twice as the GaN SBD. A breakdown voltage of the GaN JBS diode is 1.6 kV that is larger than that of the GaN SBD. The breakdown voltage of the GaN JBS diode with the specific differential on-resistance of 0.9 mΩ · cm 2 is the highest value in the reported GaN vertical Schottky barrier diode so far.
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