Recent studies have shown that IGZO are variously influenced by photoirradiation. In this study, by using measurement results of optical properties and calculation results, a relationship of defect levels in the IGZO films and the SiO 2 films to negative-bias photodegradation was examined, and the mechanism of the degradation was revealed.

To clarify the origin of the major donor states in indium gallium zinc oxide (IGZO), we report measurement results and an analysis of several physical properties of IGZO thin films. Specifically, the concentration of H atoms and O vacancies (V O ), carrier concentration, and conductivity are investigated by hard X-ray photoelectron spectroscopy, secondary ion mass spectroscopy, thermal desorption spectroscopy, and Hall effect measurements. The results of these experiments suggest that the origin of major donor states is H occupancy of V O sites. Furthermore, we use first-principles calculations to investigate the influence of the coexistence of V O and H in crystalline InGaO 3 (ZnO) m (m ¼ 1). The results indicate that when H is trapped in V O , a stable complex is created that serves as a shallow-level donor. V C 2014 AIP Publishing LLC.

We study the effect of indium–gallium–zinc oxide (IGZO) crystallinity on oxygen vacancies that play an important role in the characteristics of IGZO-based devices. Optical and electrical measurements revealed that deep defect levels due to oxygen vacancies are largely eliminated in c-axis-aligned crystal IGZO (CAAC-IGZO), which has increased crystallinity without clear grain boundaries. In this study, the correlation between crystallinity and oxygen vacancy formation has been examined by first-principles calculations to investigate the effect of oxygen vacancies in IGZO. Furthermore, the likelihood of oxygen vacancy formation at an edge portion of single-crystal IGZO has been verified by observations of oxygen atoms at the edge region of the IGZO film by annular bright-field scanning transmission electron microscopy (ABF-STEM). Experimental and calculation results show that the high crystallinity of IGZO is important for the inhibition of oxygen vacancies.

We found out that in an indium gallium zinc oxide (IGZO) transistor, the energy barrier in the channel region, i.e., the conduction band energy relative to the Fermi energy is lowered by electrons flowing from n + regions under source and drain electrodes. We have named this phenomenon "conduction band lowering (CBL) effect". Owing to this effect, even when the Fermi energy of an IGZO film gets closer to the mid-gap, a transistor formed using the film in the channel region is always turned on around a gate voltage of 0 V. In other words, by sufficiently reducing the donor concentration of the channel region, such IGZO transistors are turned on at a certain low gate voltage determined by the CBL effect and their characteristics variation can be suppressed.

The electron mobility of In-Ga-Zn-oxide (IGZO) is known to be enhanced by higher In content. We theoretically investigated the mobility-enhancement mechanism by proposing an In-Ga-Zn-disorder scattering model for an In-rich crystalline IGZO (In1+xGa1−xO3(ZnO)m (0 < x < 1, m > 0)) thin film. The obtained theoretical mobility was found to be in agreement with experimental Hall mobility for a crystalline In1.5Ga0.5O3(ZnO) (or In3GaZn2O8) thin film. The mechanism specific to In-rich crystalline IGZO thin films is based on three types of Coulomb scattering potentials that originate from effective valence differences. In this study, the In-Ga-Zn-disorder scattering model indicates that the effective valence of the In3+ ions in In-rich crystalline IGZO thin films significantly affects their electron mobility.

In–Ga–Zn oxide (IGZO) is a next-generation semiconductor material seen as an alternative to silicon. Despite the importance of the controllability of characteristics and the reliability of devices, defects in IGZO have not been fully understood. We investigated defects in IGZO thin films using electron spin resonance (ESR) spectroscopy. In as-sputtered IGZO thin films, we observed an ESR signal which had a g-value of g = 2.010, and the signal was found to disappear under thermal treatment. Annealing in a reductive atmosphere, such as N2 atmosphere, generated an ESR signal with g = 1.932 in IGZO thin films. The temperature dependence of the latter signal suggests that the signal is induced by delocalized unpaired electrons (i.e., conduction electrons). In fact, a comparison between the conductivity and ESR signal intensity revealed that the signal's intensity is related to the number of conduction electrons in the IGZO thin film. The signal's intensity did not increase with oxygen vacancy alone but also with increases in both oxygen vacancy and hydrogen concentration. In addition, first-principle calculation suggests that the conduction electrons in IGZO may be generated by defects that occur when hydrogen atoms are inserted into oxygen vacancies.

Abstract

A channel-etched IGZO field-effect transistor (FET) using Cu wiring was fabricated. Because little Cu is diffused into a c-axis aligned crystalline oxide semiconductor (CAAC-OS), which is c-axis aligned crystalline IGZO, the use of the CAAC-OS provides favorable characteristics for a channel-etched FET.