Crystallinity and texturing of RF sputtered c-axis aligned crystal InGaZnO 4 (CAAC IGZO) thin films were quantified using X-ray diffraction techniques. Above 190 C, nanocrystalline films with an X-ray peak at 2h ¼ 30 (009 planes) developed with increasing c-axis normal texturing up to 310 C. Under optimal conditions (310 C, 10% O 2 ), films exhibited a c-axis texture full-width half-maximum of 20 . Cross-sectional high-resolution transmission electron microscopy confirmed these results, showing alignment variation of 69 over a 15 Â 15 nm field of view and indicating formation of much larger aligned domains than previously reported. At higher deposition temperatures, c-axis alignment was gradually lost as polycrystalline films developed. V C 2014 AIP Publishing LLC. [http://dx.