Characterization of reactively sputtered c-axis aligned nanocrystalline InGaZnO4

Abstract

Crystallinity and texturing of RF sputtered c-axis aligned crystal InGaZnO 4 (CAAC IGZO) thin films were quantified using X-ray diffraction techniques. Above 190 C, nanocrystalline films with an X-ray peak at 2h ¼ 30 (009 planes) developed with increasing c-axis normal texturing up to 310 C. Under optimal conditions (310 C, 10% O 2 ), films exhibited a c-axis texture full-width half-maximum of 20 . Cross-sectional high-resolution transmission electron microscopy confirmed these results, showing alignment variation of 69 over a 15 Â 15 nm field of view and indicating formation of much larger aligned domains than previously reported. At higher deposition temperatures, c-axis alignment was gradually lost as polycrystalline films developed. V C 2014 AIP Publishing LLC. [http://dx.

(Invited) The Behavior of C-axis-aligned A-b-plane-anchored Crystal (CAA Crystal)

“…From the results of detailed analyses by cross-sectional TEM and other methods, we suggest the following mechanism: nanocrystals (pellets) 1-3 nm wide and 0.7-0.8 nm thick, ejected from a target during sputtering, are arranged on the deposition surface, and atomic particles also ejected from the target promote lateral growth of the pellets to anchor the pellets to each other (11). D. M. Lynch et al have conducted follow-up experiments and succeeded in reproducing CAAC-IGZO (12). This paper verifies the crystallinity and deposition mechanism for the CAAC-IGZO film, which probably has characteristics different from those of single crystal or polycrystalline IGZO films.…”

46‐2: Invited Paper: A Flexible OLED Display with Robustness and Bendability

“…Fig.1 shows a classification of crystal structures on IGZO ceramics. In previous works, we have discovered novel crystal morphologies for such materials, including c-axis-aligned crystalline IGZO (CAAC-IGZO) and nanocrystalline IGZO (nc-IGZO), which differ from single-crystalline and amorphous IGZO [9][10][11][12][13][14][15][16][17][18]. According to Kimizuka [32], CAAC-IGZO and nc-IGZO have a structure with an "intermediate state" between an amorphous structure and a crystal structure.…”

45-3: A Novel Seamless Kawara-type Multidisplay with Flexible OLED Panels Using an Optically Isotropic Film

“…We have developed our own equipment to automate this separation process, making this technology suitable for mass production [7]. The FETs use c-axis-aligned crystalline indium gallium zinc oxide [8][9][10][11][12][13], and color display is achieved with a "white tandem OLED, top emission, and color filter" (WTC) structure [14][15][16]. Transparent electrodes with different thicknesses for different colors are provided on reflective electrodes, i.e., a microcavity structure is employed.…”