21.4: Deposition Conditions and HRTEM Characterization of CAAC IGZO

Abstract

Crystallinity and texture of c-axis aligned crystal indium gallium zinc oxide (CAAC IGZO) films deposited by RF reactive sputtering were studied and characterized over a range of deposition conditions. The characteristic CAAC (009) peak at 2θ=30 o was observed by X-ray diffraction, and nanocrystalline domain texture was determined using a general area detector diffraction system (GADDS). Highly ordered CAAC films were obtained near the InGaZnO4 composition at a substrate temperature of 310 o C and in 10% O2. High-resolution transmission electron microscopy (HRTEM) confirmed the formation of CAAC showing 2-3 nm domains aligned over 15 nm x 15 nm fields of view. Cross-section HRTEM of the CAAC/substrate interface shows formation of an initially disordered IGZO layer prior to CAAC formation, suggesting a nucleation mechanism similar to ZnO thin films.

45-3: A Novel Seamless Kawara-type Multidisplay with Flexible OLED Panels Using an Optically Isotropic Film

“…We have developed our own equipment to automate this separation process, making this technology suitable for mass production [7]. The FETs use c-axis-aligned crystalline indium gallium zinc oxide [8][9][10][11][12][13], and color display is achieved with a "white tandem OLED, top emission, and color filter" (WTC) structure [14][15][16]. Transparent electrodes with different thicknesses for different colors are provided on reflective electrodes, i.e., a microcavity structure is employed.…”

26-4: Highly Oxidation-Resistant Mo-Alloys for Metal-Oxide TFT Metallization

“…Many recent publications point out the possibility to increase the semiconductor stability and TFT reliability either by a hightemperature sputter deposition process [5], or by post-deposition annealing of a sputtered IGZO film [6], typically in air or oxygen atmosphere. In this case, the temperature applied is in the range of 300 -350°C.…”

7-2: Transmissive OLED and Reflective LC Hybrid (TR-Hybrid) Display

“…We discovered CAAC-IGZO and nanocrystalline IGZO (nc-IGZO), which have crystal morphologies different from those of single crystal and amorphous IGZOs [9][10][11][12]. Cornell University has also investigated CAAC-OS [13][14][15][16][17][18]. In CAAC-IGZO films, atomic arrangement parallel to a substrate surface is observed by cross-sectional transmission electron microscopy (TEM).…”