2007 International Workshop on Physics of Semiconductor Devices 2007
DOI: 10.1109/iwpsd.2007.4472472
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Device optimization of bulk FinFETs and its comparison with SOI FinFETs

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Cited by 10 publications
(6 citation statements)
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“…3 displays I ds -V ds characteristics of bulk FinFET at V gs = 0.6 V, 0.8 V, 1.0 V. By calibrating the parameters, the characteristics of bulk FinFET in the simulation can be well consistent with the experimental data in Ref. [11]. 2.5T10 -4…”
Section: Resultsmentioning
confidence: 54%
See 1 more Smart Citation
“…3 displays I ds -V ds characteristics of bulk FinFET at V gs = 0.6 V, 0.8 V, 1.0 V. By calibrating the parameters, the characteristics of bulk FinFET in the simulation can be well consistent with the experimental data in Ref. [11]. 2.5T10 -4…”
Section: Resultsmentioning
confidence: 54%
“…[9]- [13]. Since bulk FinFET has the disadvantage in sub channel leakage due to short channel lengths, [11] we need to consider the substrate leakage issues, which are important for reducing the power consumption and improving the device performance. The decreasing of the substrate leakage current can be achieved by modulating the substrate bias voltage.…”
Section: Introductionmentioning
confidence: 99%
“…FinFETs also present relative immunity to gate line-edge roughness, a major source of variability in planar nanoscale FETs (KING, 2005). The disadvantage over MOSFETs is the harder manufacturing process due to difficulty in the lithography steps as it is increasingly difficult to print small patterns, the increased variability impact due to the further minituarization of dimensions, in comparison to MOS-FET and more constly manufacturing process due to the need of techniques to address the manufacturing imprecision and, in the case of SOI FinFET, to change the CMOS substrate process to support a SOI substrate manufacturing process (KING, 2005) (MANOJ et al, 2007.…”
Section: Introductionmentioning
confidence: 99%
“…FinFET is also divided into bulk FinFET and SOI FinFET. Bulk FinFET is designed with high doping and have disadvantage of SCE for short channel length [9]. Therefore silicon on insulator FinFET is largely preferred.…”
Section: Introductionmentioning
confidence: 99%