A generalized matrix method to treat multilayer systems with mixed coherent and incoherent optical behavior is presented. The method is based on the calculation of the light energy flux inside the multilayer, whose internal light absorption is straightforwardly derived. The Poynting vector is used to derive the light energy flux in the case of a layer with coherent behavior. Multilayer structures with any distribution of layers with coherent or incoherent behavior can be treated, including the case of oblique incidence. Use of the light energy flux instead of the more commonly used light intensity permits the calculation of light absorption with a better accuracy and a much shorter computation time.
The pulsed PECVD involves modulation of standard 13.56 MHz RF plasma in the kHz range. This allows an increase in the electron density during the 'ON' cycle, while in the 'OFF' cycle neutralizing the ions responsible for dust formation in the plasma. In this work, we report the development of state of the art nano-crystalline Si (nc-Si:H) materials using Pulsed PECVD technique with 220 crystallite orientation, grain size of ~200 Å, low O concentration and a minority carrier diffusion length, L d , of ~1.2 µm. The crucial effects of p/i interface and the incubation layer have been investigated and an efficiency of ~7.5% for single junction nc-Si:H p-in device has been achieved for the i-layer thickness of 1.4 µm, using non optimized textured substrates.
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