2000
DOI: 10.1023/a:1008717003930
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Cited by 60 publications
(27 citation statements)
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“…Similar changes of the indices have been previously observed in films of some other dielectrics [16][17][18]. These have been attributed to a decrease in the density of a film upon an increase in the oxygen partial pressure.…”
Section: Us (O1) Us (O2) Us (Wo)supporting
confidence: 82%
See 1 more Smart Citation
“…Similar changes of the indices have been previously observed in films of some other dielectrics [16][17][18]. These have been attributed to a decrease in the density of a film upon an increase in the oxygen partial pressure.…”
Section: Us (O1) Us (O2) Us (Wo)supporting
confidence: 82%
“…These changes have been attributed to the observed crystallization of Te micrograins in the films upon thermal treatment [2]. Overall, XRD studies on heat-treated tellurium oxide films [18] have revealed that the films are initially amorphous prior to heat treatment, followed by the formation of crystalline Te metal with subsequent crystallization of TeO 2 at higher temperatures. Figures 8 and 9 show the XPS spectra of the Te 3d 5/2 and O 1s peaks, respectively, for a film of the US(O1) type.…”
Section: Us (O1) Us (O2) Us (Wo)mentioning
confidence: 96%
“…All the results confirm the crystalline state of this area, which corresponds to crystallization zone. As the laser energy increases, the amorphous TeO 2 also crystallizes and transforms into ␤-TeO 2 when the temperature is about 360 • C. If further increase the laser energy beyond about 400 • C, the ␤-TeO 2 can further transform into ␣-TeO 2 [25]. The two transformations would further strengthen the optical contrast between the as-deposited film and the irradiated area.…”
Section: Discussionmentioning
confidence: 99%
“…The as-deposited TeO x film in vacuum actually consists of Te metal micrograins usually with diameters that are less than 2 nm and embedded in an amorphous TeO 2 matrix of a special granular structure [20][21][22][23]. The recording mechanism has been explained by two theories: one is the phase transformation of Te grains from amorphous to crystalline [24][25][26][27], and the other is the segregation of Te particles to the near surface [20,21]. Regardless of the actual reasons behind the change in optical behaviors of the TeO x film, the result indicates a visible change from bright to dark under laser pulse irradiation.…”
Section: Introductionmentioning
confidence: 99%
“…TeO x 박막은 스퍼터링, 열증착, 졸겔 등 다양한 방법 으로 제작되고 있다 [11][12][13]. 대부분의 TeO x 박막 연구 는 특정 조성인 TeO 2 박막에 대한 제작 및 특성 평가가 주로 수행되고 있다 [11,14].…”
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