Abstract:TeO x thin films were deposited at various O 2 /Ar gas-flow ratios by a reactive RFmagneton sputtering technique from TeO 2 and Te targets. X-ray diffraction (XRD) results revealed that the TeO x thin films were amorphous. The structure and chemical composition of the TeO x thin films were investigated by fourier transform infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS). The optical characteristics of the TeO x thin films were investigated by an Ellipsometer and a UV-VIS-NIR spectropho… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.