Laser-induced grayscale patterning in TeOx thin films

Dun, Aihuan; Ma, Xiaojun; Wei, Jingsong; Gan, Fuxi

doi:10.1016/j.matchemphys.2011.09.065

Cited by 2 publications

(1 citation statement)

References 28 publications

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“…Spot heating using laser pulses have been shown to generate pillars due to expansion of molten thermoplastic with some control of their size based on laser intensity, but suffers from large variances in feature morphology [15]. Grey-scale photolithography has been demonstrated in the creation of three-dimensional (3D) features, but is not widely utilized because of the need for specialized photomasks [13,14,16,17,18]. Material printing [18,19,20,21,22] and computer numerical controlled (CNC) micro machining [23] are becoming versatile options for rapid prototyping of 3D microfluidics.…”

Section: Introductionmentioning

confidence: 99%

One-Step Fabrication of Microchannels with Integrated Three Dimensional Features by Hot Intrusion Embossing

Debono

Voicu

Pousti

et al. 2016

Sensors

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We build on the concept of hot intrusion embossing to develop a one-step fabrication method for thermoplastic microfluidic channels containing integrated three-dimensional features. This was accomplished with simple, rapid-to-fabricate imprint templates containing microcavities that locally control the intrusion of heated thermoplastic based on their cross-sectional geometries. The use of circular, rectangular and triangular cavity geometries was demonstrated for the purposes of forming posts, multi-focal length microlense arrays, walls, steps, tapered features and three-dimensional serpentine microchannels. Process variables, such as temperature and pressure, controlled feature dimensions without affecting the overall microchannel geometry. The approach was demonstrated for polycarbonate, cycloolefin copolymer and polystyrene, but in principle is applicable to any thermoplastic. The approach is a step forward towards rapid fabrication of complex, robust, microfluidic platforms with integrated multi-functional elements.

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