This paper proposes and evaluates a built-in position sensor for an electrostatic motor called a dual excitation multiphase electrostatic drive. The built-in sensor operates on a similar principle to typical capacitance-type linear encoders. The sensor system superimposes a high-frequency sensor signal onto a low-frequency driving signal so that it can share the same electrodes with driving operation of the motor. This paper analyses the sensor principle based on a capacitance network model of the motor that allows us to evaluate the linearity error of the proposed sensor system. The sensor was implemented on a prototype motor to evaluate its performance. The experimental results confirmed that the sensor can work successfully by sharing the same electrodes with the driving operation. The linearity error was found to be 24 µm when no driving signal was applied. As the driving signal was applied, the linearity error was found to increase up to 48 µm.
Measurements of the densities of the molecular and atomic ions (n H + , n H2 + , n H3 + ) were carried out in hydrogen recombination plasma in the linear divertor plasma simulator, TPD-SheetIV. The molecular and atomic ion currents were detected using an omegatron mass analyzer. The ground-state vibrational temperature of hydrogen molecules T vib is obtained by measurement with VUV emission spectroscopy. Taking into account of T vib , a zero-dimensional model using the relevant rate balance equations was found to predict the observed dominant ion.
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