High-power pulsed magnetron discharges have drawn an increasing interest as an approach to produce highly ionized metallic vapor. In this paper we propose to study how the plasma composition and the deposition rate are influenced by the pulse duration. The plasma is studied by time-resolved optical emission and absorption spectroscopies and the deposition rate is controlled thanks to a quartz microbalance. The pulse length is varied between 2.5 and 20 s at 2 and 10 mTorr in pure argon. The sputtered material is titanium. For a constant discharge power, the deposition rate increases as the pulse length decreases. With 5 s pulse, for an average power of 300 W, the deposition rate is ϳ70% of the deposition rate obtained in direct current magnetron sputtering at the same power. The increase of deposition rate can be related to the sputtering regime. For long pulses, self-sputtering seems to occur as demonstrated by time-resolved optical emission diagnostic of the discharge. In contrary, the metallic vapor ionization rate, as determined by absorption measurements, diminishes as the pulses are shortened. Nevertheless, the ionization rate is in the range of 50% for 5 s pulses while it lies below 10% in the case of a classical continuous magnetron discharge.
Highly ordered ultra-long oxide nanotubes are fabricated by a simple two-step strategy involving the growth of copper nanowires on nanopatterned template substrates by magnetron sputtering, followed by thermal annealing in air. The formation of such tubular nanostructures is explained according to the nanoscale Kirkendall effect. The concept of this new fabrication route is also extendable to create periodic zero-dimensional hollow nanostructures.
Mass spectrometry of atmospheric pressure plasmas S Große-Kreul, S Hübner, S. Schneider et al. Clusters in intense FLASH pulses C Bostedt, M Adolph, E Eremina et al. Dissociative attachment and vibrational excitation in electron collisions withCl2 M-W Ruf, S Barsotti, M Braun et al. Ionization dynamics of XUV excited clusters: the role of inelastic electron collisions M Müller, L Schroedter, T Oelze et al. Plasma diagnostics for understanding the plasma-surface interaction in HiPIMS discharges: a review Nikolay Britun, Tiberiu Minea, Stephanos Konstantinidis et al.Abstract. Intense laser fields are known to induce strong ionization in atoms. In nanoclusters, ionization is only stronger, resulting in very high charge densities that lead to Coulomb explosion and emission of accelerated highly charged ions. In such a strongly ionized system, it is neither conceivable nor intuitive that energetic negative ions can originate. Here we demonstrate that in a dense cluster ensemble, where atomic species of positive electron affinity are used, it is indeed possible to generate negative ions with energy and ion yield approaching that of positive ions. It is shown that the process behind such a strong charge reduction is extraneous to the ionization dynamics of single clusters within the focal volume. Normal and well-known charge transfer reactions are insufficient to explain the observations. Our analysis reveals the formation of a manifold of Rydberg excited clusters around the focal volume that facilitate orders of magnitudes more efficient electron transfer. This phenomenon, which involves an active role of laser-heated electrons, comprehensively explains the formation of copious accelerated negative ions from the nano-cluster plasma.
The influence of the capacitive (E)-to-inductive transition (H) in inductively coupled plasma discharges is investigated for propanethiol plasma polymerization. In the E mode, at low plasma density, the sulfur content in the layers, measured by XPS, is quite high and strongly decreases after aging in the air. This phenomenon is attributed to the desorption of trapped sulfur-based molecules (e.g., H 2 S). In the H mode, presumably higher surface temperature prevents the trapping scenario during the layer growth and, as a consequence, yields a lower sulfur content which is stable after aging. Mass spectrometry measurements reveal important variations of the plasma chemistry depending on the discharge mode. The major change concerns the complete disappearance of the precursor in the H mode accompanied by the large production of CS 2 molecules. Furthermore, a linear correlation is found between the concentration of the CS 2 species and the atomic sulfur content in the Hmode synthesized layers. In addition, based on DFT calculations, different pathways of fragmentation are proposed as a function of the plasma parameters. The whole set of results highlight the importance of the E−H transition for the growth of thiol-based plasma polymers.
Time-resolved characterization of an Ar-Ti high-power impulse magnetron sputtering discharge has been performed. This paper deals with two-dimensional density mapping in the discharge volume obtained by laser-induced fluorescence imaging. The time-resolved density evolution of Ti neutrals, singly ionized Ti atoms (Ti þ ), and Ar metastable atoms (Ar met ) in the area above the sputtered cathode is mapped for the first time in this type of discharges. The energetic characteristics of the discharge species are additionally studied by Doppler-shift laser-induced fluorescence imaging. The questions related to the propagation of both the neutral and ionized discharge particles, as well as to their spatial density distributions, are discussed. V C 2015 AIP Publishing LLC.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.