Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

Britun, Nikolay; Palmucci, Maria; Konstantinidis, Stéphanos; Snyders, Rony

doi:10.1063/1.4919006

Cited by 45 publications

(67 citation statements)

References 57 publications

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“…(5). This agrees with the findings of Britun et al 13,14 which by comparing the temporal behavior of the various species in an argon discharge with titanium target conclude that Penning ionization is negligible in the HiPIMS discharges. It is clear from Eq.…”

Section: Phys Plasmas 22 113508 (2015)supporting

confidence: 82%

“…Such an arrangement of an argon discharge with aluminum target was explored by Vitelaru et al 25 who found that the steady state metastable density between the high power pulses is up to 10% of the maximum metastable density in the pulse. The same order of magnitude was found independently by Britun et al, 14 however without pre-ionization. Thus, we made a separate test of the 0.5 A and 40 A cases with seed densities lying from 0.1% to 10% of the maximum argon metastable density.…”

Section: Phys Plasmas 22 113508 (2015)supporting

confidence: 75%

“…For a magnetron sputtering discharge in argon at 1.33-133 Pa, magnetic field density up to 0.3 T, and pulse voltage amplitude up to 3 kV, the second mechanism is the one realized in practice. 12 Recent experimental studies of the HiPIMS discharge in argon with a titanium target include the recording of the temporal density variation of Ti, Ti þ , Ar, and Ar þ along with metastable states using resonant absorption spectroscopy 13 and 2D mapping of the Ti, Ti þ , and Ar m using laser induced fluorescence (LIF), 14 determination of the electron density and electron temperature, 15,16 and ionized flux fraction, [16][17][18][19] and determination of the titanium ionization fraction. 13,20 Here, we study the role of the argon metastables using the m-IRM for HiPIMS discharges, in particular, how much of the ionization goes through stepwise ionization and what is the role of Penning ionization for the ionization of the sputtered species.…”

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Are the argon metastables important in high power impulse magnetron sputtering discharges?

et al. 2015

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Time-resolved temperature study in a high-power impulse magnetron sputtering discharge J. Appl. Phys. 114, 013301 (2013) We use an ionization region model to explore the ionization processes in the high power impulse magnetron sputtering (HiPIMS) discharge in argon with a titanium target. In conventional dc magnetron sputtering (dcMS), stepwise ionization can be an important route for ionization of the argon gas. However, in the HiPIMS discharge stepwise ionization is found to be negligible during the breakdown phase of the HiPIMS pulse and becomes significant (but never dominating) only later in the pulse. For the sputtered species, Penning ionization can be a significant ionization mechanism in the dcMS discharges, while in the HiPIMS discharge Penning ionization is always negligible as compared to electron impact ionization. The main reasons for these differences are a higher plasma density in the HiPIMS discharge, and a higher electron temperature. Furthermore, we explore the ionization fraction and the ionized flux fraction of the sputtered vapor and compare with recent experimental work. V C 2015 AIP Publishing LLC.[http://dx

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Section: Phys Plasmas 22 113508 (2015)supporting

confidence: 82%

Section: Phys Plasmas 22 113508 (2015)supporting

confidence: 75%

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confidence: 99%

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Are the argon metastables important in high power impulse magnetron sputtering discharges?

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“…9 We therefore focused here on DCMS discharges and anticipate that the findings will provide much insight when interpreting the more complicated case of HiPIMS discharges. 48,49 B. Double layer, potential hump, and electron energization…”

Section: Discussionmentioning

confidence: 99%

Plasma potential of a moving ionization zone in DC magnetron sputtering

Panjan

Anders

2017

Journal of Applied Physics

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Using movable emissive and floating probes, we determined the plasma and floating potentials of an ionization zone (spoke) in a direct current magnetron sputtering discharge. Measurements were recorded in a space and time resolved manner, which allowed us to make a three-dimensional representation of the plasma potential. From this information we could derive the related electric field, space charge, and the related spatial distribution of electron heating. The data reveal the existence of strong electric fields parallel and perpendicular to the target surface. The largest E-fields result from a double layer structure at the leading edge of the ionization zone. We suggest that the double layer plays a crucial role in the energization of electrons since electrons can gain several 10 eV of energy when crossing the double layer. We find sustained coupling between the potential structure, electron heating, and excitation and ionization processes as electrons drift over the magnetron target. The brightest region of an ionization zone is present right after the potential jump, where drifting electrons arrive and where most local electron heating occurs. The ionization zone intensity decays as electrons continue to drift in the Ez × B direction, losing energy by inelastic collisions; electrons become energized again as they cross the potential jump. This results in the elongated, arrowhead-like shape of the ionization zone. The ionization zone moves in the –Ez × B direction from which the to-be-heated electrons arrive and into which the heating region expands; the zone motion is dictated by the force of the local electric field on the ions at the leading edge of the ionization zone. We hypothesize that electron heating caused by the potential jump and physical processes associated with the double layer also apply to magnetrons at higher discharge power, including high power impulse magnetron sputtering.

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“…Among the plasma diagnostics techniques utilized in this work, optical emission spectroscopy, including high‐resolution Fabry‐Perot interferometry (FPI); resonant optical absorption spectroscopy (ROAS); laser‐induced fluorescence (LIF), including LIF imaging, Doppler‐shift LIF (DS‐LIF), and DS‐LIF imaging should be mentioned. The main principles of these techniques as well as their typical applications have been reviewed recently, and are also available elsewhere . In this paper the evolution of the HiPIMS discharge characterization starting from mainly qualitative line‐of‐sight OES measurements, and moving toward the time‐resolved density imaging of the main ground state atoms is described.…”

Section: Introductionmentioning

confidence: 99%

An Overview on Time‐Resolved Optical Analysis of HiPIMS Discharge

Britun

Konstantinidis

Snyders

2015

Plasma Processes & Polymers

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The progress in the time-resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser-induced fluorescence-based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed.

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Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

Cited by 45 publications

References 57 publications

Are the argon metastables important in high power impulse magnetron sputtering discharges?

Are the argon metastables important in high power impulse magnetron sputtering discharges?

Plasma potential of a moving ionization zone in DC magnetron sputtering

An Overview on Time‐Resolved Optical Analysis of HiPIMS Discharge

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