We have been studying on subthreshold characteristics of SOI MOSFETs in terms of substrate
bias dependence, using a 1-D Poisson equation on an SOI multi-layer structure for estimating
structural parameters of real devices[1]. Here, we consider quantum mechanical
effects in the electron inversion layer of thin SOI MOSFETs, implementing a self-consistent
solver of Poisson and Schrödinger equations in a 1-D subthreshold simulator. From results of
simulations, we have concluded that quantum mechanical effects need to be considered in
analizing thin SOI devices.
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