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Organic–inorganic hybrids featuring tunable material properties can be readily generated by applying vapor- or liquid-phase infiltration (VPI or LPI) of inorganic materials into organic templates, with resulting properties controlled by type and quantity of infiltrated inorganics. While LPI offers more diverse choices of infiltratable elements, it tends to yield smaller infiltration amount than VPI, but the attempt to address the issue has been rarely reported. Here, we demonstrate a facile temperature-enhanced LPI method to control and drastically increase the quantity and kinetics of Pt infiltration into self-assembled polystyrene-block-poly­(2-vinylpyridine) block copolymer (BCP) thin films. By applying LPI at mildly elevated temperatures (40–80 °C), we showcase controllable optical functionality of hybrid BCP films along with conductive three-dimensional (3D) inorganic nanostructures. Structural analysis reveals enhanced metal loading into the BCP matrix at higher LPI temperatures, suggesting multiple metal ion infiltration per monomer of P2VP. Combining temperature-enhanced LPI with hierarchical multilayer BCP self-assembly, we generate BCP-metal hybrid optical coatings featuring tunable antireflective properties as well as scalable conductive 3D Pt nanomesh structures. Enhanced material infiltration and control by temperature-enhanced LPI not only enables tunability of organic–inorganic hybrid nanostructures and properties but also expands the application of BCPs for generating uniquely functional inorganic nanostructures.

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Novel positive-tone hybrid resists developed by vapor-phase inorganic infiltration feature fully tunable resist performance parameters and high-aspect-ratio pattern transfer capability.

With the progress in the synthesis of high quality ZnO nanowires, their implementation as gas sensors has gained popularity. Relying on the surface ionosorption, these devices have demonstrated exquisite sensitivity with further improvement achieved through various functionalisation methods. Both resistive and transistor based methodologies are employed for gas sensing while integration of micro-heaters has also been attempted for portability of the devices. In order to achieve successful inclusion amongst semiconductor fabrication processes, top-down approaches are being explored along with conventional bottom-up synthesis routes. Major challenge of low selectivity can be overcome by Electronic Nose systems. This article reviews the progress in synthesis, functionalisation, and device implementation of ZnO nanowire gas sensors, concluding with remarks on associated challenges and future prospects.

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Background: Metal-containing resists entered the mainstream semiconductor industry process flow to mitigate the low absorbance of extreme ultraviolet (EUV) radiation by thin films of organic resists that lead to poor sensitivity and their inability to handle rigors of development and etching conditions.Aim: The long and rich history of using metal-containing resists in electron beam lithography can offer interesting lessons, pointers, and insights to the relatively newcomer EUV lithography, which is slightly over a decade old.Approach: Electron beam lithography has been enjoying a considerable amount of freedom in the choice of resist materials for close to 50 years; especially the use of metal-containing resists to attain not only single digit nanometer resolution, higher sensitivity, and etch resistance but also lower line-edge roughness. Here, we make a comprehensive historical review of the progress made in the patterning of metal-containing resists in electron beam lithography and derive insights that can be potentially useful in EUV patterning.Perspectives: Small molecular weight resists are proven to be crucial for achieving higher resolution with low line-edge roughness. Simplifying process flow by reducing etch-stack-layers is conceivable with metal-containing resists, along with direct-patterning of functional materials for heterogeneous integration. Efficient contact hole patterning at tighter pitches may be incumbent on progress in positive-tone resist research.

This paper discusses the growth of polycrystalline, self-supporting ZnO nanofibres which can detect nitrogen dioxide (NO2) gas down to 1 part per billion (ppb), one of the smallest detection limits reported for NO2 using ZnO. A new and innovative method has been developed for growing polycrystalline ZnO nanofibres. These nanofibres have been created using core-shell electrospinning of inorganic metal precursor zinc neodecanoate, where growth occurs at the core of the nanofibres. This process produces contamination-free, selfsupporting, polycrystalline ZnO nanofibres of the average diameter and grain size 50 nm and 8 nm respectively, which are ideal for gas sensing applications. This process opens up an exciting opportunity for creating nanofibres from a variety of metal oxides, facilitating many new applications especially in the areas of sensors and wearable technologies.