We present an upgraded time-resolved LADA system, with a 25ps pulsed laser, integrated into a commercial laser scanning microscope used in failure analysis. We demonstrate the use of this system on 14nm/16nm finfet devices.
Time-resolved photon emission has been shown to be useful in analyzing clock skews and timing-related defects in flip-chip devices. In practice, time-resolved photon emission using the S-25 Quantar detector cannot be used at long loop lengths (typically >10 μs). This paper discusses a near-infrared (NIR) optimized time-resolved emission system to demonstrate that even with long loop lengths time-resolved photon emission can be extremely useful for defect localization. Specifically, it describes time-resolved photon emission system, and shows how time-resolved photon emission was used to solve two different issues that caused scan fails on silicon-on-insulator devices, and briefly discusses the interpretation of optical waveforms. The two issues are presented as case studies.
This paper describes how a DDR loopback test failure was analyzed successfully after being repackaged from an MBGA into a TBGA package substrate. DDR loopback test methodology is discussed as well as the advanced failure analysis techniques that were used to identify the root cause of failure.
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