Picosecond Time-Resolved LADA Integrated with a Solid Immersion Lens on a Laser Scanning Microscope

Abstract

We present an upgraded time-resolved LADA system, with a 25ps pulsed laser, integrated into a commercial laser scanning microscope used in failure analysis. We demonstrate the use of this system on 14nm/16nm finfet devices.

Failure Analysis of Damages on Advanced Technologies Induced by Picosecond Pulsed Laser During Space Radiation SEE Testing

“…The pulsed laser SEE test method is widely accepted as non-cumulative as it does not induce permanent damages (displacement damage and total ionizing dose) which were commonly induced [4][5][6] during particle radiation tests. In addition, in the field of failure analysis, picosecond 1064 nm pulsed laser techniques have recently been demonstrated as a useful tool to conduct time resolved laser assisted device alteration analysis [7]. With the aggressive scaling down in technology nodes, advanced microelectronic devices utilize new materials and processing methods, of which, the full comprehension on material reactions and reliability can be difficult to accomplish.…”