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Low-temperature co-fired ceramic (LTCC) enables development and testing of critical elements on microsystem boards as well as nonmicroelectronic meso-scale applications. We describe silicon-based microelectromechanical systems packaging and LTCC meso-scale applications. Microfluidic interposers permit rapid testing of varied silicon designs. The application of LTCC to micro-high-performance liquid chromatography (m-HPLC) demonstrates performance advantages at very high pressures. At intermediate pressures, a ceramic thermal cell lyser has lysed bacteria spores without damaging the proteins. The stability and sensitivity of LTCC/chemiresistor smart channels are comparable to the performance of silicon-based chemiresistors. A variant of the use of sacrificial volume materials has created channels, suspended thick films, cavities, and techniques for pressure and flow sensing. We report on inductors, diaphragms, cantilevers, antennae, switch structures, and thermal sensors suspended in air. The development of ''functional-as-released'' moving parts has resulted in wheels, impellers, tethered plates, and related new LTCC mechanical roles for actuation and sensing. High-temperature metal-to-LTCC joining has been developed with metal thin films for the strong, hermetic interfaces necessary for pins, leads, and tubes.

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A~STRACTExperiments have been performed on surface micromachined microengines driving load gears to determine the effect of the rotation frequency on median cycles to failure. We did observe a frequency dependence and have developed a model based on fundamental wear mechanisms and forces exhibited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and in a few instances lead to fracture of the pin joint in the drive gear.

A micromachined accelerometer device structure with diffraction-based optical detection and integrated electrostatic actuation is introduced. The sensor consists of a bulk silicon proof mass electrode that moves vertically with respect to a rigid diffraction grating backplate electrode to provide interferometric detection resolution of the proof-mass displacement when illuminated with coherent light. The sensor architecture includes a monolithically integrated electrostatic actuation port that enables the application of precisely controlled broadband forces to the proof mass while the displacement is simultaneously and independently measured optically. This enables several useful features such as dynamic self-characterization and a variety of force-feedback modalities, including alteration of device dynamics in situ. These features are experimentally demonstrated with sensors that have been optoelectronically integrated into sub-cubic-millimeter volumes using an entirely surface-normal, rigid, and robust embodiment incorporating vertical cavity surface emitting lasers and integrated photodetector arrays. In addition to small form factor and high acceleration resolution, the ability to self-characterize and alter device dynamics in situ may be advantageous. This allows periodic calibration and in situ matching of sensor dynamics among an array of accelerometers or seismometers configured in a network.

Surface micromachined comb drive and microengine fluence thresholds and failure modes were investigated in x-ray, electron, and proton total-dose environments. Very high fluence levels were necessary to induce motion degradation or lockup for normal device biasing or operation. For the abnormal biasing of ungrounded or partially grounded dice, significantly lower fault thresholds were observed, but still in a medium or high fluence range.

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