We present a detailed theoretical and numerical analysis of temperature gradient focusing (TGF) via Joule heating-an analytical species concentration and separation technique relying upon the dependence of an analyte's velocity on temperature due to the temperature dependence of a buffer's ionic strength and viscosity. The governing transport equations are presented, analyzed, and implemented into a quasi-1D numerical model to predict the resulting temperature, velocity, and concentration profiles along a microchannel of varying width under an applied electric field. Numerical results show good agreement with experimental trials presented in previous work. The model is used to analyze the effects of varying certain geometrical and experimental parameters on the focusing performance of the device. Simulations also help depict the separation capability of the device, as well as the effectiveness of different buffer systems used in the technique. The analysis provides rule-of-thumb methodology for implementation of TGF into analytical systems, as well as a fundamental model applicable to any lab-on-a-chip system in which Joule heating and temperature-dependent electrokinetic transport are to be analyzed.
A micromachined accelerometer device structure with diffraction-based optical detection and integrated electrostatic actuation is introduced. The sensor consists of a bulk silicon proof mass electrode that moves vertically with respect to a rigid diffraction grating backplate electrode to provide interferometric detection resolution of the proof-mass displacement when illuminated with coherent light. The sensor architecture includes a monolithically integrated electrostatic actuation port that enables the application of precisely controlled broadband forces to the proof mass while the displacement is simultaneously and independently measured optically. This enables several useful features such as dynamic self-characterization and a variety of force-feedback modalities, including alteration of device dynamics in situ. These features are experimentally demonstrated with sensors that have been optoelectronically integrated into sub-cubic-millimeter volumes using an entirely surface-normal, rigid, and robust embodiment incorporating vertical cavity surface emitting lasers and integrated photodetector arrays. In addition to small form factor and high acceleration resolution, the ability to self-characterize and alter device dynamics in situ may be advantageous. This allows periodic calibration and in situ matching of sensor dynamics among an array of accelerometers or seismometers configured in a network.
Micromachined microphones with diffraction-based optical displacement detection have been introduced previously [Hall et al., J. Acoust. Soc. Am. 118, 3000-3009 (2005)]. The approach has the advantage of providing high displacement detection resolution of the microphone diaphragm independent of device size and capacitance-creating an unconstrained design space for the mechanical structure itself. Micromachined microphone structures with 1.5-mm-diam polysilicon diaphragms and monolithically integrated diffraction grating electrodes are presented in this work with backplate architectures that deviate substantially from traditional perforated plate designs. These structures have been designed for broadband frequency response and low thermal mechanical noise levels. Rigorous experimental characterization indicates a diaphragm displacement detection resolution of 20 fm radicalHz and a thermal mechanical induced diaphragm displacement noise density of 60 fm radicalHz, corresponding to an A-weighted sound pressure level detection limit of 24 dB(A) for these structures. Measured thermal mechanical displacement noise spectra are in excellent agreement with simulations based on system parameters derived from dynamic frequency response characterization measurements, which show a diaphragm resonance limited bandwidth of approximately 20 kHz. These designs are substantial improvements over initial prototypes presented previously. The high performance-to-size ratio achievable with this technology is expected to have an impact on a variety of instrumentation and hearing applications.
Piezoelectric MEMS microphones have been researched for more than 30 years. Despite many advantages, they have not seen widespread use because the signal-to-noise ratio (SNR) has been poor relative to capacitive MEMS microphones. This work describes piezoelectric MEMS microphones, utilizing aluminum nitride as a piezoelectric material, with a better SNR than many capacitive MEMS microphones on the market today. Further, this work describes and measures the noise sources in these microphones. Piezoelectric MEMS microphones with an SNR of 66 dB and 68 dB are presented.
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