Micromachines on the march

Bryzek, Janusz; Peterson, K.; McCulley, W.

doi:10.1109/6.278394

Cited by 178 publications

(67 citation statements)

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“…With successful integration of electrical, mechanical, material, computer science, control, and bioengineering, new MEMS applications are emerging. Progress is facilitated by the fact that silicon, which is among the world's best-characterized materials [2], surpasses stainless steel in yield strength and aluminum in strengthto-weight ratio. Despite their small size on the order of that of a human hair, however, MEMS devices are no less mechanical or complex than bridges and skyscrapers.…”

Section: » a P P L I C A T I O N S O F C O N T R O L 18 Ieee Control mentioning

confidence: 99%

“…Due to the silicon micromachining process and the high density of MEMS devices on a single chip, compensation and control issues must be incorporated into the design of the device since single-pass fabrication is essential for economic viability. Therefore, all modes of functionality must be incorporated into the design phase; in the macro world, these phases might be left to testing and calibration [2]. Standard physical modeling principles can be used to derive distributed dynamic models for MEMS devices.…”

Section: Mems Chipmentioning

confidence: 99%

“…However, preshaping usually requires an accurate mathematical model of the device, which may not be available due to fabrication inconsistencies and, thus, lack of repeatability of the device parameters. In [1], a gain scheduling approach is used to compensate for device variability, while [2] discusses built-in circuitry for testing and calibrating MEMS devices along with the capability to program the calibration constants directly into an IC fabricated with the device. To achieve increased precision and faster response, closed-loop control is required.…”

Section: Open-loop Versus Closed-loop Controlmentioning

confidence: 99%

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Control issues for microelectromechanical systems

Borovic¹,

Lewis²,

McCulley³

et al. 2006

IEEE Control Syst.

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Section: » a P P L I C A T I O N S O F C O N T R O L 18 Ieee Control mentioning

confidence: 99%

Section: Mems Chipmentioning

confidence: 99%

Section: Open-loop Versus Closed-loop Controlmentioning

confidence: 99%

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Control issues for microelectromechanical systems

Borovic¹,

Lewis²,

McCulley³

et al. 2006

IEEE Control Syst.

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“…MEMS is a vastly enabling technology that provide innovative system design concepts, fabrication methods, and use. The essence of MEMS is the integrated microfabrication technology, also called micromachining (1)(2)(3)(4)(5)(6)(7).…”

Section: Introductionmentioning

confidence: 99%

<title>Scaling laws of microactuators and potential applications of electroactive polymers in MEMS</title>

Liu

Bar‐Cohen

1999

SPIE Proceedings

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Besides the scale factor that distinguishes the various spices fundamentally biological muscles changes little between species indicating a highly optimized system, Electroactive polymer actuators offer the closest resemblance to biological muscles however beside the large actuation displacement these materials are falling short with regards to the actuation force. As improved materials emerging it is becoming necessary to address key issues such as the need for effective electromechanical modeling and guiding parameters in scaling the actuators. In this paper, we will review the scaling laws for three major actuation mechanisms that are of relevance to micro electromechanical systems: electrostatic actuation, magnetic actuation, thermal bimetallic actuation, and piezoelectric actuation.

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“…In the past few years, the scope of fabrication techniques and the types of devices categorized as MEMS have widened dramatically [10,17,42,43]. Most are fabricated from silicon using standard microlithographic techniques (silicon bulk micromachining and polysilicon surface micromachining) 144-461.…”

mentioning

confidence: 99%

Microfabrication, Microstructures and Microsystems

Qin

Xia

Rogers

et al. 1998

Topics in Current Chemistry

135

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This review gives a brief introduction to materials and techniques used for microfabrication. Rigid materials have typically been used to fabricate microstructures and systems. Elastomeric materials are becoming attractive, and may have advantages for certain types of applications. Photolithography is the most commonly used technique for the fabrication of structures for microelectronic circuits, microelectromechanical systems, microanalytical devices and micro-optics. Soft lithography represents a set of non-photolithographic techniques: it forms micropatterns of self-assembled monolayers (SAMs) by contact printing and generates microstructures of polymers by contact molding. The aim of this paper is to illustrate how non-traditional materials and methods for fabrication can yield simple, cost-effective routes to microsystems, and now they can expand the capabilities of these systems.

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Micromachines on the march

Cited by 178 publications

References 0 publications

Control issues for microelectromechanical systems

Control issues for microelectromechanical systems

<title>Scaling laws of microactuators and potential applications of electroactive polymers in MEMS</title>

Microfabrication, Microstructures and Microsystems

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