Control issues for microelectromechanical systems

Borovic, B.; Lewis, Frank L.; McCulley, W.; Liu, Ai Qun; Kolesar, Edward S.; Popa, Dan O.

doi:10.1109/mcs.2006.1615266

Cited by 15 publications

(1 citation statement)

References 6 publications

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“…The control theoretical treatments of MEMS systems based on PDE models are very limited [16]. The control of microelectrical machines is considered in [7].…”

Section: Introductionmentioning

confidence: 99%

Repetitive control of an electrostatic microbridge actuator: theory and simulation

Zhao¹,

Rahn²

2010

Smart Mater. Struct.

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Electrostatic microactuators are used extensively in MEMS sensors, RF switches and microfluidic pumps. The high bandwidth operation required by these applications complicates the implementation of feedback controllers. This paper designs, proves stability and simulates a feedforward repetitive controller for an electrostatic microbridge. High residual stress creates tension in the microbridge that dominates bending stiffness so a pinned string model with uniform electrostatic force loading is used for model-based control. The control objective is to force the microbridge displacement to follow prescribed spatial and periodic time trajectories. Viscous damping ensures boundedness of the distributed transverse displacement in response to bounded inputs. The average displacement is measured by capacitive sensing and processed offline using a repetitive control algorithm that updates a high speed waveform generator's parameters. Simulations show that the performance depends on the amount of damping. With less than 1% damping in a representative microbridge structure, repetitive control reduces the midspan displacement overshoot by 83%.

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“…The control theoretical treatments of MEMS systems based on PDE models are very limited [16]. The control of microelectrical machines is considered in [7].…”

Section: Introductionmentioning

confidence: 99%

Repetitive control of an electrostatic microbridge actuator: theory and simulation

Zhao¹,

Rahn²

2010

Smart Mater. Struct.

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Alleviation of residual oscillations in electrostatically actuated variable-width microbeams using a feedforward control strategy

Godara

Joglekar

2016

Microsyst Technol

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An output feedback LPV control strategy of a nonlinear electrostatic microgripper through a singular implicit modeling

Faria¹,

Gorrec²,

Haddab³

et al. 2014

Control Engineering Practice

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The aim of the paper is the design and the analysis of a gain scheduled controller for an accurate and fast positioning with nanometer resolution of a nonlinear electrostatic microgripper. The controller is designed to achieve a positioning of the gripping arm from few hundred nanometers to several tens of micrometers with some performance criteria. This very large operating range is crucial for a range of microrobotics applications and has never been addressed in existing control techniques of microgrippers. The controller is designed considering noises that are relevant at the nanometer scale and nonlinearities that become significant at the micrometer scale. Therefore, a nonlinear model of the system is proposed and is reformulated into a polynomial LPV (Linear Parameter Varying) model. The most relevant source of noise to be considered for the controller synthesis is defined taking into account results from previous works. Considering the particular polynomial parametric dependence of the LPV model, a multivariable controller is designed using an affine LPV descriptor representation of the system and specific linear matrix inequalities. The efficiency of the controller and the relevance of the theoretical approach are demonstrated through experimental implementation results.

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Control issues for microelectromechanical systems

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Cited by 15 publications

References 6 publications

Repetitive control of an electrostatic microbridge actuator: theory and simulation

Repetitive control of an electrostatic microbridge actuator: theory and simulation

Alleviation of residual oscillations in electrostatically actuated variable-width microbeams using a feedforward control strategy

An output feedback LPV control strategy of a nonlinear electrostatic microgripper through a singular implicit modeling

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