The effect of frequency on the lifetime of a surface micromachined microengine driving a load

Tanner, Darren; Miller, William M.; Eaton, William P.; Irwin, Lloyd W.; Peterson, K.; Dugger, Michael Thomas; Senft, Daniel C.; Smith, Norman F.; Tangyunyong, Paiboon; Miller, S. L.

doi:10.1109/relphy.1998.670438

Cited by 51 publications

(40 citation statements)

References 10 publications

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“…But friction and wear limit in the lifetime of MEMS components so much that reliable, commercially available microscopic devices have until now not employed sliding surfaces [2]. Beautiful focused ion beam (FIB) cross-sections of micro-motor test vehicles show that wear of MEMS with sliding surfaces can indeed be severe [3].…”

Section: Introductionmentioning

confidence: 99%

The Leiden MEMS Tribometer: Real Time Dynamic Friction Loop Measurements With an On-Chip Tribometer

Spengen

Frenken

2007

Tribol Lett

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On-chip MEMS tribometer devices until now have been much less sophisticated for dynamically sensing frictional forces than their FFM (friction force microscope) counterparts. In this article, we present a MEMS-based tribometer that can be used to measure dynamically, onchip and in-situ, the frictional properties of MEMS-scale contact geometries. The device provides the first FFM-like friction loops with contacting MEMS sidewall surfaces. Depending on the normal load two regimes of operation are identified. At low and intermediate loads, the frictional behaviour reflects wear-less relative motion of the silicon oxide surfaces of the MEMS device and we observe repeatable, irregular stick-slip behaviour, related to the surface roughness. At very high loads, wear causes changes in the topography of the contacting surfaces.

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Section: Introductionmentioning

confidence: 99%

The Leiden MEMS Tribometer: Real Time Dynamic Friction Loop Measurements With an On-Chip Tribometer

Spengen

Frenken

2007

Tribol Lett

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“…We compared the lifetime results of the pin linkage design to the predictive model [41] for the number of revolutions to failure. We developed two models that are based on the fundamental principles of the physics of wear in a mechanically resonating system.…”

Section: Introductionmentioning

confidence: 99%

MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

Tanner¹,

Smith²,

Irwin³

et al. 2000

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“…The gear rotates about a hub that was anchored to the substrate. The microengine has been the focus of much investigation for MEMS devices experiencing sliding friction 1,9 . We used the microengine to drive the load gear depicted in the close-up view as shown in Figure 2.…”

Section: Mechanical Designmentioning

confidence: 99%

“…Failure analysis on the pin linkage microengine driving a load has proceeded in much the same way as its counterpart, the flex linkage system 1 . It was possible to optically document the existences of wear debris at drive gear hubs and, occasionally, its broadcast over the top of the gear from the drive pin region.…”

Section: Failure Analysismentioning

confidence: 99%

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Linkage design effect on the reliability of surface-micromachined microengines driving a load

et al. 1998

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The reliability of microengines is a function of the design of the mechanical linkage used to connect the electrostatic actuator to the drive. We have completed a series of reliability stress tests on surface micromachined microengines driving an inertial load. In these experiments, we used microengines that had pin mechanisms with guides connecting the drive arms to the electrostatic actuators. Comparing this data to previous results 1 using flexure linkages revealed that the pin linkage design was less reliable. The devices were stressed to failure at eight frequencies, both above and below the measured resonance frequency of the microengine. Significant amounts of wear debris were observed both around the hub and pin joint of the drive gear. Additionally, wear tracks were observed in the area where the moving shuttle rubbed against the guides of the pin linkage. At each frequency, we analyzed the statistical data yielding a lifetime (t 50 ) for median cycles to failure and σ, the shape parameter of the distribution. A model was developed to describe the failure data based on fundamental wear mechanisms and forces exhibited in mechanical resonant systems. The comparison to the model will be discussed.

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The effect of frequency on the lifetime of a surface micromachined microengine driving a load

Cited by 51 publications

References 10 publications

The Leiden MEMS Tribometer: Real Time Dynamic Friction Loop Measurements With an On-Chip Tribometer

The Leiden MEMS Tribometer: Real Time Dynamic Friction Loop Measurements With an On-Chip Tribometer

MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

Linkage design effect on the reliability of surface-micromachined microengines driving a load

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