MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

Tanner, Darren; Smith, Norman F.; Irwin, Lloyd W.; Eaton, William P.; Helgesen, Karen Sue; Clement, J. J.; Miller, William M.; Miller, S. L.; Dugger, Michael Thomas; Walraven, Jeremy A.; Peterson, Kara J.

doi:10.2172/750344

Cited by 88 publications

(55 citation statements)

References 23 publications

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“…Together with the ultralow friction, this self-repairing mechanism makes MWNTs even more attractive as constitutive elements in nanoelectromechanical systems (NEMS), and much more suitable for this purpose than, for example, silicon (Tanner et al 2000).…”

Section: (C ) Mechanical Measurements: Interlayer Forcementioning

confidence: 99%

Nanomechanics of carbon nanotubes

Kis

Zettl

2008

Phil. Trans. R. Soc. A.

110

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Some of the most important potential applications of carbon nanotubes are related to their mechanical properties. Stiff sp 2 bonds result in a Young's modulus close to that of diamond, while the relatively weak van der Waals interaction between the graphitic shells acts as a form of lubrication. Previous characterization of the mechanical properties of nanotubes includes a rich variety of experiments involving mechanical deformation of nanotubes using scanning probe microscopes. These results have led to promising prototypes of nanoelectromechanical devices such as high-performance nanomotors, switches and oscillators based on carbon nanotubes.

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Section: (C ) Mechanical Measurements: Interlayer Forcementioning

confidence: 99%

Nanomechanics of carbon nanotubes

Kis

Zettl

2008

Phil. Trans. R. Soc. A.

110

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“…Wear and damage to contact conjunctions in loadbearing surfaces, such as meshing gear teeth of micro-electromechanical devices has become a major concern and a stumbling block in technological advances in the field [1,2]. The principal sources of the problem are adhesion of surfaces and ingression of moisture into the contact, both of which can cause damage to the rough-cut surfaces of the usual silica substrate.…”

Section: Introductionmentioning

confidence: 99%

Dry and wet nano-scale impact dynamics of rough surfaces with or without a self-assembled monolayer

Teodorescu¹,

Rahnejat²

2007

Proceedings of the Institution of Mechanical Engineers, Part N:

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In nanoscale conjunctions, molecular interactions cannot be ignored, nor surface energy effects, adhesion of surface asperities, or their stiction by any wetting action of an intervening fluidic media. Many experimental micro-electromechanical systems (MEMS) are prone to failure or malfunction due to structural degradation (wear and damage) of their load-bearing and power-transmitting conjunctions. Remedial solutions have been attempted by surface treatments, such as the introduction of self-assembled monolayers (SAMs) that adhere to the surfaces, and which are hydrophobic in nature. The physics of many of the contributing phenomena, such as adhesion, meniscus action, or electrostatics, are reasonably well understood, but their interactions under small-scale impacting condition is less investigated. The problem has a transient nature, owing to inertial dynamics, surface topography, attractive surface energy of asperities, and formation of any condensates. The interplay between these kinetics, using the established models, can be quite complex, particularly with regard to prediction of contact area and pull-off force in rebound of impacting pairs. The behaviour can vary from near classical Hertzian to that dominated by adhesion. The repercussions can be very significant in power transmission or load bearing for these small devices. This paper attempts to contribute to the growing understanding of contact behaviour in smallscale.

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“…To avoid this problem, an expensive solution is to place telescopes in space (such as Hubble). Another interesting and least expensive solution for its ability to use large telescopes, not limited by the dimensions that can be handled in space transport, is what brought the development of mirrors whose surface is deformed by MEMS, correcting distortions produced by the atmosphere land (Tanner et al, 2000). Another scientific application of MEMS was the realization of instruments for measuring forces between two objects whose surfaces are at submicron distances (<1um).…”

Section: Operations Of Memsmentioning

confidence: 99%

“…For this reason MEMS presents deterioration in the electrical connections, and originates electrical failures, and it is not detected until are checked in the last steps of the manufacturing process or when buyers are used, causing economic losses. In base of this, an analyss was made to know the behaviour of corrosion phenomena in the MEMS used in the development of new technologies in the electronics, mechanical and electromechanical systems (Tanner et al, 2000).…”

Section: Introductionmentioning

confidence: 99%