Possible mechanisms to achieve high mobility in zinc oxynitride (ZnON) have been investigated by comparison with other thin film semiconductors. Integrated processes to fabricate ZnON TFTs have been developed. Issues and challenges encountered at current stage will be discussed.
The production worthiness of sputtered Al 2 O 3 barrier films on Gen 8.5 substrates using rotary targets on PVD array system PiVot TM is demonstrated in order to provide increased stability to IGZO AM-OLED backplanes. The achieved Al 2 O 3 layer properties and uniformity illustrate the advantages of using rotary technology.
Advanced static DC magnetron sputtering methods based on the magnet wobbling technique were investigated to achieve highly uniform and homogeneous metallization layers. The novel split sputter mode (SSM) method, wherein the deposition process is divided into two distinct steps, enables the AKT rotary cathode technology to provide excellent layer properties, while keeping a high production throughput. The effectiveness of the SSM technique was demonstrated through copper-coated large-area substrates.
IGZO deposition by rotary sputtering targets serves the needs for high-performance, low-manufacturing-cost TFTs. Both, manufacturability of rotary targets and performance of produced TFTs confirm the feasibility and underline the advantages of using rotary technology.
INTRODUCTIONIt has been demonstrated that IGZO TFT backplanes can be used for advanced displays by several display manufacturers 1-3 , although many challenges are still to overcome for large scale production. One of the challenges is to make large area displays repeatedly with good TFT performance and low cost. Because of its success for deposition of high quality transparent conductive oxide layers and metallization layers on larger substrates (2500x2200mm), rotary target sputtering technology has been considered as the solution to address the challenge. In this paper, results of a systematic study, including target manufacturing, film deposition, TFT performance testing under normal and stressed conditions, are presented to demonstrate the feasibility.
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