The evolution of the ion implantation damage in device processing

Polignano, M. L.; Mica, I.; Bontempo, V.; Cazzaniga, F.; Mariani, M.; Mauri, Aurelio Giancarlo; Pavia, G.; Sammiceli, F.; Spoldi, G.

doi:10.1007/s10854-008-9630-4

Cited by 4 publications

(2 citation statements)

References 4 publications

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“…Several works have reported that extant insular birds are larger, on average, than mainland birds (Clegg & Owens, 2002;Gaston & Blackburn, 1995;Gotelli & Graves, 1990;Olson et al, 2009). That said, ignoring recently extinct taxa may obscure the true evolutionary patterns (Louchart, 2005;Meiri et al, 2011;Polignano et al, 2008).…”

Section: Introductionmentioning

confidence: 99%

Big, flightless, insular and dead: Characterising the extinct birds of the Quaternary

Fromm

Meiri

2021

Journal of Biogeography

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Aim: Birds have recently undergone a major extinction event which apparently is ongoing. According to some estimates, humans have caused the extinction of up to 20% of the entire avian species diversity since the latter part of the Pleistocene. Few attempts, however, were made to determine how many extinctions are actually known, rather than projected to have occurred. We aimed to quantify the known avian extinctions and assess the relevance of factors thought to have promoted their extinctions, that is, large size, flightlessness and insularity. Location: Global.Taxon: Aves. Materials and Methods:We collected data on bird extinctions from the literature. We recorded the geographic range, flight ability and body size of each species. If mass data were unavailable, we estimated them from linear measurements using machine learning tools. We modelled masses of extinct birds on those of extant ones and estimated the effects of taxonomy, body mass, insularity and flight ability. Results:We have identified 469 species of birds that humans, directly or indirectly, drove to extinction. These extinctions have predominantly occurred on islands. Extinct birds were often flightless. We estimated the body mass of 291 extinct species and found that overall, the median mass of extinct species was seven times larger than that of extant ones. Extinctions mostly occurred in families of large-bodied birds, whilst lineages of small birds have fared better. Insular birds are overall larger than mainland birds, a trend that becomes even more evident when the extinct forms are analyzed. However, within lineages, sizes are only slightly larger on islands than on continents.Main conclusions: Our findings suggest that extinct bird species differed from extant birds by being larger, mostly restricted to islands, and often flightless. These factors made them especially vulnerable to human prosecution and to other anthropogenically related declines. Our modern understanding of birds is skewed with respect to the nature of avian faunas that existed before the current wave of human-induced extinctions changed our world forever.

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Section: Introductionmentioning

confidence: 99%

Big, flightless, insular and dead: Characterising the extinct birds of the Quaternary

Fromm

Meiri

2021

Journal of Biogeography

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“…Transmission Electron Microscopy (TEM) analyses are compared to the defect evolution obtained by a Kinetic Monte Carlo (KMC) simulation approach. Implantation-induced point defects are shown to be more easily annealed out if the silicon surface is close to the damaged region, because the silicon surface acts as a point defect sink, thus reducing the interstitial excess generated in the implantation (14).…”

Section: Introductionmentioning

confidence: 99%

(Invited) Defect Generation in Device Processing and Impact on the Electrical Performances

et al. 2013

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This paper collects the results of some experiments aimed at investigating the physical mechanisms of defect generation in devices. It is shown that suitable limits for the mechanical stress can be defined to prevent defect generation. In addition, a high temperature stress release annealing can be beneficial for stress reduction and defect prevention. The annealing of implanted layers may result in crystal defect formation even with no contribution from mechanical stress. In this case, the silicon surface plays a relevant role in reducing the point defect concentration and hence the nucleation of extended defects. In the annealing process of high energy implantations, the most damaged region is far from the wafer surface. Under these conditions, impurities in the silicon substrate play a relevant role in determining the resulting defect morphology. The presence of interstitial oxygen forces defects to grow along <110> directions parallel to the silicon surface, thus preventing them to reach the device region.

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Impact of STI on Statistical Variability and Reliability of Decananometer MOSFETs

Wang

Roy

Brown

et al. 2011

IEEE Electron Device Lett.

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The evolution of the ion implantation damage in device processing

Cited by 4 publications

References 4 publications

Big, flightless, insular and dead: Characterising the extinct birds of the Quaternary

Big, flightless, insular and dead: Characterising the extinct birds of the Quaternary

(Invited) Defect Generation in Device Processing and Impact on the Electrical Performances

Impact of STI on Statistical Variability and Reliability of Decananometer MOSFETs

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