Semi-automated Assembly of a MEMS-Based Micro-scale CMM Probe and Future Optimization of the Process Chain with a View to Desktop Factory Automation

Claverley, James D.; Burisch, Arne; Leach, Richard; Raatz, Annika

doi:10.1007/978-3-642-28163-1_2

Cited by 3 publications

(2 citation statements)

References 6 publications

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“…For microprobe systems, it is difficult to process microprobes and assemble microprobe systems [42,43]. Probes require dimensions which are less than a few hundred nanometers; therefore, it is difficult to process measurements with high precision because the probe tip requires high sphericity.…”

Section: Issues For Microprobe Systemmentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.

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Section: Issues For Microprobe Systemmentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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“…This work considers components in the 0.4 to 2 mm range, larger than typical micro assembly parts, as these are most immediately applicable to 3-dimensional assemblies whose major dimensions are in the z-axis. This includes assemblies such as micro-optical benches (MOB) [33,34] and tactile probes for micro coordinate measuring machines (CMM) [35,36]. This work builds on the current literature by presenting a detailed experimental analysis on the use of 3D printed topographical features for self-assembly using liquid surface tension.…”

Section: Introductionmentioning

confidence: 99%