Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Abstract

Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.

High-precision radius and sphericity measurement for microspheres of micro-CMM probe tip

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Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

“…Recent advances in machining technology have increased demand for the microfabrication of micro molds, various nozzle holes, through silicon via (TSV) semiconductors, micro electro mechanical systems (MEMSs), micro components such as micromachines, optical communication devices, and medical devices [1][2][3]. However, it is extremely difficult to accurately measure microstructures such as micrometer-order small holes and grooves with a high aspect ratio.…”

Design Aspects of Additive Manufacturing at Microscale: A Review

“…The efficient capturing of the underlying physics (i.e., that governing physical laws), the level of material modeling, the manufacturing methods employed, and the metrological considerations for the evaluation of the product performance are of major importance during both the design and the manufacturing phase, which, at the microscale, suffers from a major dilemma. The above concerns have been heavily discussed and investigated over the past few years at the meso/macroscale [ 4 , 5 ] and, during the last two decades, at the nanoscale [ 6 , 7 ]. However, although the distinction between macro- and nanoscale tools is well established, the tools and methodologies of these scales can be applied and frequently find a use in research into microscale applications, by underutilizing or fitting these methodologies to various microscale aspects.…”