This paper describes the development and initial testing of a novel three-axis vibrating micro-scale co-ordinate measuring machine (micro-CMM) probe. The vibrating micro-CMM probe is designed to address the needs of micro-manufacturing industry, in particular the requirement to measure high aspect ratio micrometre sized features to nanometre accuracy. The vibrating micro-CMM probe was also designed to address the problems inherent with micrometre and nanometre scale co-ordinate measurements caused by surface interaction forces. The initial concepts were first developed using extensive computational modelling and materials analysis. Production techniques were also investigated. The result was a micro-CMM probe consisting of three flexures, instrumented with piezoelectric actuators and sensors. The micro-CMM probe is capable of controlled vibrations in three axes; an essential feature of the design that directly addresses the problems inherent with tactile CMM probe interactions with measurement surfaces on the micrometre and nanometre scale. The ability of this micro-CMM probe to accurately measure high aspect ratio features will be dependant on the aspect ratio of the stylus. Investigations have been conducted to determine the optimum dimensions of the stylus.

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The National Physical Laboratory, UK, has been active in the field of engineering nanometrology for a number of years. A summary of progress over the last five years is presented in this paper and the following research projects discussed in detail. (1) Development of an infrastructure for the calibration of instruments for measuring areal surface topography, along with the development of areal software measurement standards. This work comprises the use of the optical transfer function and a technique for the simultaneous measurement of topography and the phase change on reflection, allowing composite materials to be measured. (2) Development of a vibrating micro-CMM probe with isotropic probing reaction and the ability to operate in a non-contact mode. (3) A review of x-ray computed tomography and its use in dimensional metrology. (4) The further development of a metrology infrastructure for atomic force microscopy and the development of an instrument for the measurement of the effect of the probe–surface interaction. (5) Traceable measurement of displacement using optical and x-ray interferometry to picometre accuracy. (6) Development of an infrastructure for low-force metrology, including the development of appropriate transfer artefacts.

Quantitative phase imaging (QPI) utilizes refractive index and thickness variations that lead to optical phase shifts. This gives contrast to images of transparent objects. In quantitative biology, phase images are used to accurately segment cells and calculate properties such as dry mass, volume and proliferation rate. The fidelity of the measured phase shifts is of critical importance in this field. However to date, there has been no standardized method for characterizing the performance of phase imaging systems. Consequently, there is an increasing need for protocols to test the performance of phase imaging systems using well-defined phase calibration and resolution targets. In this work, we present a candidate for a standardized phase resolution target, and measurement protocol for the determination of the transfer of spatial frequencies, and sensitivity of a phase imaging system. The target has been carefully designed to contain well-defined depth variations over a broadband range of spatial frequencies. In order to demonstrate the utility of the target, we measure quantitative phase images on a ptychographic microscope, and compare the measured optical phase shifts with Atomic Force Microscopy (AFM) topography maps and surface profile measurements from coherence scanning interferometry. The results show that ptychography has fully quantitative nanometer sensitivity in optical path differences over a broadband range of spatial frequencies for feature sizes ranging from micrometers to hundreds of micrometers.

Abstract. This paper describes the development of an analytical model to describe a novel three-axis vibrating micro-scale probe for micro-co-ordinate measuring machines (micro-CMMs). The micro-CMM probe is vibrated in three axes, in order to address the problems inherent with micro-and nano-scale co-ordinate measurements caused by surface interaction forces. These surface forces have been investigated and a mathematical model describing an ideal probing situation has been developed. The vibration amplitude required for the probe to overcome the surface interaction forces has been calculated using this model. The results of initial vibration experiments are reported and the suitability of the probe to counteract the surface interaction forces is confirmed.