2010
DOI: 10.1007/978-3-642-11598-1_15
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Abstract: Abstract. This paper describes the development of an analytical model to describe a novel three-axis vibrating micro-scale probe for micro-co-ordinate measuring machines (micro-CMMs). The micro-CMM probe is vibrated in three axes, in order to address the problems inherent with micro-and nano-scale co-ordinate measurements caused by surface interaction forces. These surface forces have been investigated and a mathematical model describing an ideal probing situation has been developed. The vibration amplitude r…

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