2010
DOI: 10.1007/978-3-642-11598-1_15
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Abstract: Abstract. This paper describes the development of an analytical model to describe a novel three-axis vibrating micro-scale probe for micro-co-ordinate measuring machines (micro-CMMs). The micro-CMM probe is vibrated in three axes, in order to address the problems inherent with micro-and nano-scale co-ordinate measurements caused by surface interaction forces. These surface forces have been investigated and a mathematical model describing an ideal probing situation has been developed. The vibration amplitude re… Show more

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Cited by 10 publications
(5 citation statements)
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References 8 publications
(11 reference statements)
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“…The two constituent parts of the micro-CMM probe were then successfully handled and assembled using two different setups. Future work will focus on the automation of this assembly, and complete verification of the completed micro-scale vibrating CMM probe [2] [3].…”
Section: Discussionmentioning
confidence: 99%
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“…The two constituent parts of the micro-CMM probe were then successfully handled and assembled using two different setups. Future work will focus on the automation of this assembly, and complete verification of the completed micro-scale vibrating CMM probe [2] [3].…”
Section: Discussionmentioning
confidence: 99%
“…The standard deviation of the largest diameter of the spherical tips was as small as 0.727 µm while keeping the single pulse electro-discharge at the central point [7]. The use of tungsten for the tool manufacturing ensures that the stylus has the appropriate mechanical properties necessary for contact probing applications [3]. Also, tungsten has an appropriate surface tension while solidifying into ball-ended tips.…”
Section: Stylus Manufacturementioning
confidence: 99%
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“…The important factors are the contact angle of water on the surfaces and, of course, the humidity. The capillary force is derived from the following equation (Claverlery et al 2010).…”
Section: Capillary Forcementioning
confidence: 99%
“…The repeatability of the probe was reported to be 0.1 µm, which became commercially available. The NPL also proposed a probe using a three-legged elastic mechanism with two piezo drives to generate vibrations [28,29]. Thus, the amplitude of vibrations could be sensed by a piezoelectric sensor.…”
Section: Introductionmentioning
confidence: 99%