2018 91st ARFTG Microwave Measurement Conference (ARFTG) 2018
DOI: 10.1109/arftg.2018.8423820
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On the Impact of Radiation Losses in TRL Calibrations

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Cited by 11 publications
(5 citation statements)
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“…In Godshalk (1992) the effect of surface waves in wafer probing environments has been discussed. More recently, the effect of substrate modes on multiline-Thru-Reflect-Line (mTRL) calibrated measurements has been clarified (Phung et al, 2018a) up to 220 GHz and the multimode propagation causing radiation effects has been discussed up to 325 GHz (Spirito et al, 2018b).…”
Section: Introductionmentioning
confidence: 99%
“…In Godshalk (1992) the effect of surface waves in wafer probing environments has been discussed. More recently, the effect of substrate modes on multiline-Thru-Reflect-Line (mTRL) calibrated measurements has been clarified (Phung et al, 2018a) up to 220 GHz and the multimode propagation causing radiation effects has been discussed up to 325 GHz (Spirito et al, 2018b).…”
Section: Introductionmentioning
confidence: 99%
“…To deepen the understanding of high frequency measurements, electromagnetic (EM) simulation is usually performed [10]- [15], [17], [19]- [21]. Out of these reported works, most of the EM simulation analyses are dedicated to test structures fabricated on non-Silicon substrate up to 110 GHz [12], [20] and above 110 GHz [10], [11], [15]. In [10], [15], the EM simulation analysis covering more than one frequency band is presented using only one RF probe model.…”
Section: Introductionmentioning
confidence: 99%
“…Out of these reported works, most of the EM simulation analyses are dedicated to test structures fabricated on non-Silicon substrate up to 110 GHz [12], [20] and above 110 GHz [10], [11], [15]. In [10], [15], the EM simulation analysis covering more than one frequency band is presented using only one RF probe model. For Si based test structures also, EM simulation analysis covering more than one frequency band (1 GHz to above 110 GHz) is presented using only one RF probe model [13], [14], [17].…”
Section: Introductionmentioning
confidence: 99%
“…Up to now, most of the time, external calibration kits on alumina substrates are used. However, above 50-100 GHz, this characterization approach suffers from high measurement uncertainties due to difference of dielectric constant between the calibration kit and the silicon wafer, and also the coupling between the probes and the silicon wafer [1,2]. To overcome these issues, some authors propose to integrate an on-wafer calibration kit together with the DUT (Device Under Test) [3].…”
Section: Introductionmentioning
confidence: 99%