Investigation of microstructure and properties of ultrathin graded ZrNx self-assembled diffusion barrier in deep nano-vias prepared by plasma ion immersion implantation

Zou, Jia; Liu, Bo; Lin, Liwei; Lu, Yuanfu; Dong, Yuanhua; Jiao, Guohua; Ma, Fei; Li, Qiran

doi:10.1016/j.apsusc.2017.08.114

Cited by 4 publications

(1 citation statement)

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“…Zirconium nitride (ZrN) is one of the most studied transition metal nitrides due to its extremely high melting point, high hardness, good thermochemical resistance, wear resistance and optical properties [1][2][3]. It has been used in many applications as a hard and protective coating, esthetic coating, diffusion barrier or Schottky contacts in microelectronics [4][5][6]. More recently, ZrN films have been investigated as protective coatings or fuel matrix materials for various applications in nuclear reactors [7,8].…”

Section: Introductionmentioning

confidence: 99%

Microstructural investigations of 800 keV Ar ions irradiated nanocrystalline ZrN thin films

Crǎciun

Vasile

Lambers

et al. 2019

Surface Engineering

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The effect of 800 keV Ar ion irradiation on the microstructure and composition of ZrN films grown by pulsed laser deposition technique was investigated. Grazing incidence and symmetrical X-ray diffraction showed films were nanostructured, with grain size around 13 nm and (111) textured. X-ray reflectivity investigations showed a 0.7% decrease of films density after irradiation with a fluence of 1 × 10 14 cm −2 and no further decreased for a fluence of 1 × 10 15 cm −2 . An increase of the lattice parameter and a decrease of grain size after irradiation with a fluence of 1 × 10 14 cm −2 was observed and almost no change after irradiation with a fluence of 1 × 10 15 cm -2 . X-ray photoelectron spectroscopy investigations did not detect changes in the composition of films after irradiation. Transmission electron microscopy studies confirmed that the films were nanocrystalline, compact, with columnar crystallites without pores or voids. After irradiation, the microstructure was not affected and no other phases appeared.

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