2013
DOI: 10.7567/apex.6.016503
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InGaN Channel High-Electron-Mobility Transistors with InAlGaN Barrier andfT/fmaxof 260/220 GHz

Abstract: Depletion-mode high-electron-mobility transistors (HEMTs) with an 11 nm quaternary In0.13Al0.83Ga0.04N barrier and a 5 nm In0.05Ga0.95N channel on SiC substrates have been fabricated. The as-processed HEMT structure features a channel electron density of 2.08×1013 cm-2 and a mobility of 1140 cm2 V-1 s-1. A device with a 50-nm-long T-shaped gate shows a maximum output current density of 2.0 A/mm, a peak extrinsic DC transconductance of 690 mS/mm, and cut-off frequencies fT/fmax of 260/220 GHz at the same bias, … Show more

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Cited by 42 publications
(26 citation statements)
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“…This is consistent with the observation that InGaAs-channel HEMTs exhibit higher speed than GaN or Si based FETs. To further improve the GaN HEMT speed, it is paramount to seek approaches that enhance injection velocity thus g m,int , such as the use of InGaN [12] or isotope-disordered channels [13]. Aggressive gate length scaling and optimization of GaN HEMT has led to impressive progress reaching device speed about 400 GHz.…”
Section: Gan Based Hemt Devices Towards Thzmentioning
confidence: 99%
“…This is consistent with the observation that InGaAs-channel HEMTs exhibit higher speed than GaN or Si based FETs. To further improve the GaN HEMT speed, it is paramount to seek approaches that enhance injection velocity thus g m,int , such as the use of InGaN [12] or isotope-disordered channels [13]. Aggressive gate length scaling and optimization of GaN HEMT has led to impressive progress reaching device speed about 400 GHz.…”
Section: Gan Based Hemt Devices Towards Thzmentioning
confidence: 99%
“…Yachao Zhang et al presented the InGaN double channel (DC) HEMT on Sapphire substrate [30] and the device shown stable transconductance in spite of low FT/FMAX. In recent years, InGaN channel based HEMTs proven its superior performance than conventional GaN channel based HEMTs [30][31][32][33][34].…”
Section: Introductionmentioning
confidence: 99%
“…The lower electron mass and narrow bandgap of InGaN material enhance the carrier mobility and creates the deeper potential well with wide bandgap material. And also, the InGaN channel HEMTs had demonstrated superior performance at high temperature, current collapse reduction, low noise, and suppression of virtual gate effects [30][31][32][33][34]. However, the breakdown voltage of the InGaN channel-based devices is relatively lower than GaN channel based HEMTs because of narrow bandgap.…”
Section: Introductionmentioning
confidence: 99%
“…Laboutin et al designed AlInGaN/AlN/InGaN/GaN high electron mobility transistor (HEMT) structures and reported the record electron mobilities from 1070 to 1290 cm 2 V · s −1 with sheet carrier density of ≈2 × 10 13 cm −2 in In x Ga 1‐x N ( x = 0.05–0.1) channel. Ronghua Wang et al fabricated a depletion‐mode HEMT with 11 nm quaternary In 0.13 Al 0.83 Ga 0.04 N barrier and 5 nm In 0.05 Ga 0.95 N channel on SiC substates and featured a record high fT·fnormalmax of 239 GHz for InGaN channel HEMTs. Zhang et al adopted a two‐step AlN interlayer in AlGaN/InGaN heterostructures to improve the quality of the interface between barrier and buffer, and obtained a record highest channel electron mobility of 1681 cm 2 V · s −1 .…”
Section: Introductionmentioning
confidence: 99%