In this study, we proposed a novel technology for developing a nanoscale, high-resolution, and cost-efficient next-generation semiconductor process that uses exposure technology with ultraviolet-light-emitting diode (UV-LED) arrays and poly(dimethylsiloxane) (PDMS) flexible soft mold imprint technology in order to develop a vacuum-assisted photoresist filling technology for microstructures. By integrating the characteristics of the PDMS soft mold, photocure resist, and vacuum-assisted filling system to fabricate waveguide components, conformal contact was obtained between a PDMS soft mold and a substrate surface, at a low surface free energy. The vacuum-assisted filling system was used to achieve compact and complete photoresist filling. There is no residual layer left after filling and a subsequent process is no longer necessary; thus, cost and process time can be effectively reduced. Recently, nanometer component manufacturing technology and its applications have become more sophisticated.
This study focused on the combination of atomic force microscopy (AFM) and quartz crystal microbalance (QCM) to construct the ultrasound assisted AFM base nanomachining experimental platform, and to construct the experimental planning of ultrasonic assisted nanomachining, to understand the phenomena of the ultrasound assisted AFM base nanomachining. Firstly, we combined the AFM and QCM to construct the ultrasound assisted AFM base nanomachining experimental platform. And a normal force measurement model was built by force curve measurements in ultrasound vibration environment. Next, the ultrasonic assisted nanomachining was carried out and aimed at brittle and ductile materials to probe into the influence of different experimental parameters such as probe speed, normal force and workpiece material on the cutting depth, width and chip stacking. After the experiments, it is succeeded in the ultrasound assisted AFM base nanomachining experimental platform in this study. And it can be found that the ultrasonic assisted nanomachining is possessed great influence on the cutting depth and width.
The purpose of this study was investigated the relationship between information education of energy attitude and energy instructional strategy of science and technology teacher in junior high schools in Taiwan. With the questionnaires and statistic analysis of 618 teachers, we found the energy attitude of teachers is positive and they made good use of energy instructional strategies. The energy safe attitude of teachers whose age are 41-50 years old were better than those below 28 years old and 29-33. The energy safe attitude of teachers who worked for 16-25 years were better than those below 5 years and 6-15 years. And the saving energy attitude of teachers who taught in school above 49 classes were better than those below 12 classes. At the same time we found the infusing question strategy and cognitive-oriented strategy of teachers whose age were 41-50 years old made better use of than those age were 29-33 years old. The energy attitude could forecast the using situation of energy instructional strategy especially in infusing question strategy, cognitive-oriented strategy and total energy instructional strategies.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.