A study of the nanomachining and nanopatterning on different materials using atomic force microscopy

Huang, Jen Ching; Weng, Yung Jin; Liu, Huail Siang

doi:10.1504/ijmpt.2014.062941

Cited by 3 publications

(2 citation statements)

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“…The AFM technique has provided a simple, but useful, method for nanofabrication. The AFM-based nanolithography techniques developed in the past decades include mechanical scratching [ 3 , 4 , 5 , 6 , 7 ], anodization [ 8 , 9 , 10 ] and nanoscale electrical discharge machining [ 11 ], and nano-scale near-field photolithography [ 12 ]. Researchers have also attempted to fabricate nano structures by using the nanometer-scale movement and probe of an AFM as a micro tool.…”

Section: Introductionmentioning

confidence: 99%

“…The SPL is a next-generation lithography technique that enables observation of the nanoscale or even atomic-scale surface structures and features, at high-resolution, through the interaction between the AFM probe and the surface. The effectiveness of SPL is comparable to that of lithography, and SPL has great potential for development [ 6 , 7 , 8 , 9 , 10 , 11 , 12 ]. However, creating molds at the nano-scale is a limiting factor.…”

Section: Introductionmentioning

confidence: 99%

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Prediction Surface Morphology of Nanostructure Fabricated by Nano-Oxidation Technology

et al. 2015

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Atomic force microscopy (AFM) was used for visualization of a nano-oxidation technique performed on diamond-like carbon (DLC) thin film. Experiments of the nano-oxidation technique of the DLC thin film include those on nano-oxidation points and nano-oxidation lines. The feature sizes of the DLC thin film, including surface morphology, depth, and width, were explored after application of a nano-oxidation technique to the DLC thin film under different process parameters. A databank for process parameters and feature sizes of thin films was then established, and multiple regression analysis (MRA) and a back-propagation neural network (BPN) were used to carry out the algorithm. The algorithmic results are compared with the feature sizes acquired from experiments, thus obtaining a prediction model of the nano-oxidation technique of the DLC thin film. The comparative results show that the prediction accuracy of BPN is superior to that of MRA. When the BPN algorithm is used to predict nano-point machining, the mean absolute percentage errors (MAPE) of depth, left side, and right side are 8.02%, 9.68%, and 7.34%, respectively. When nano-line machining is being predicted, the MAPEs of depth, left side, and right side are 4.96%, 8.09%, and 6.77%, respectively. The obtained data can also be used to predict cross-sectional morphology in the DLC thin film treated with a nano-oxidation process.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Prediction Surface Morphology of Nanostructure Fabricated by Nano-Oxidation Technology

et al. 2015

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Nanomachining analysis of a multi-cracked atomic force microscope cantilever based on a modified couple stress theory

2015

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The vibration analysis of an atomic force microscope (AFM) cantilever with an arbitrary number of cracks during the nanomachining process is studied based on the modified couple stress theory. The cantilever with [Formula: see text] cracks is divided into [Formula: see text] segments by the cracks and a rotational spring is used to simulate each crack. An analytical expression for the vibration frequency and displacement of the cracked cantilever is derived. According to the analysis, in addition, the displacement increases with an increase in the number of cracks and crack flexibilities. For nanomachining, the displacement of the cantilever tip is related to the depth of cut. The area under the displacement-time curve implies the material removal rate. The present study is useful for the design of an AFM-based nanomachining cantilever with cracks.

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Development of a Non-RigidMicro-Scale Cutting Mechanism Measuring the Cutting Force Using an Optical Lever

Herrera-Granados¹,

Ashida²,

Ogura³

et al. 2014

Int. J. Automation Technol.

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A new cutting mechanism for the fabrication of microscale grooves is presented in this study. Based on the control principle of the nano-cutting mechanism using an Atomic Force Microscope (AFM), in the newly developed system, a single crystal diamond tool is mounted at the free edge of a cantilever beam and is used for the removal of material. During the cutting process, the cantilever undergoes a deformation that is required for the implementation of a machining force feedback control. It was experimentally observed that the use of this mechanism enables to maintain the cutting depth of the micro-grooves constant even if they are fabricated on inclined surfaces; this is achieved by maintaining the normal cutting force constant using a feedback controller. For this experimental system, an optical lever is used to measure the angular deformation at the tip of the cantilever, thus providing a better understanding of total cutting force involved in the machining process.

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A study of the nanomachining and nanopatterning on different materials using atomic force microscopy

Cited by 3 publications

References 0 publications

Prediction Surface Morphology of Nanostructure Fabricated by Nano-Oxidation Technology

Prediction Surface Morphology of Nanostructure Fabricated by Nano-Oxidation Technology

Nanomachining analysis of a multi-cracked atomic force microscope cantilever based on a modified couple stress theory

Development of a Non-RigidMicro-Scale Cutting Mechanism Measuring the Cutting Force Using an Optical Lever

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