Application of Vacuum-Assisted Filling System with Ultraviolet-Light-Emitting Diode Array to Fabrication of Waveguide Microstructures

Abstract

In this study, we proposed a novel technology for developing a nanoscale, high-resolution, and cost-efficient next-generation semiconductor process that uses exposure technology with ultraviolet-light-emitting diode (UV-LED) arrays and poly(dimethylsiloxane) (PDMS) flexible soft mold imprint technology in order to develop a vacuum-assisted photoresist filling technology for microstructures. By integrating the characteristics of the PDMS soft mold, photocure resist, and vacuum-assisted filling system to fabricate waveguide components, conformal contact was obtained between a PDMS soft mold and a substrate surface, at a low surface free energy. The vacuum-assisted filling system was used to achieve compact and complete photoresist filling. There is no residual layer left after filling and a subsequent process is no longer necessary; thus, cost and process time can be effectively reduced. Recently, nanometer component manufacturing technology and its applications have become more sophisticated.

Recent progress in fabrication methods for micro structures on optical thin film

“…Lan等人 [18] 提出了一种释放 压力减少变形的载荷施加方法, 用于PDMS软模UV 固化成形工艺中减少几何畸变. Weng等人 [19] [21] 研究了黏度、壁面滑移和表面张力等尺度依赖 的参数对材料充型的影响, 发现当流道尺寸在几微 米或者更小时总会出现壁面滑移现象. Tian等人 [22] 此外, Neo和Park [25] 进一步完善了模型来描述紫外光 固化过程中的单体转化.…”

The application of magnetic fluid bag micro-roll imprinting technology in optical anti-reflective and solar concentrator soft film replication

“…If the roll imprinting velocity is increased, it may result in too short roll imprinting time and poor formation [4][5][6]. Therefore, to properly improve the evenness of roll imprinting force and increase roll imprinting velocity are the major problems in urgent need of improvement for the roll imprinting process at the present stage [7][8][9][10].…”

Development of an innovative magnetic-aided roller microtransfer replica process and a study of microstructure array replication

“…Compared with plane imprint technology, roller imprint technology has advantage of continuous mass production and shortened imprint cycle [6][7][8][9]. Furthermore, general roller imprint forms microstructure on the roller or coats over the roller; however, due to difficulty in close adhesion, mould displacement and twists often occur in rolling, and imprinting with a soft mould causes problems, such as insufficient strength and intolerance to high temperatures [10][11][12][13][14][15][16]. To improve the above disadvantages, this study independently developed and assembled a magnetic roller imprint machine, and attempted to use a magnetic-aided [17][18][19] roller microstructure imprint process to continuously replicate a microstructure on a magnetic roller to a polymer film surface, which utilizes magnetic attraction force between magnetic rollers to create highly conformal imprinting.…”