Published data concerning plasma methods of the fabrication and study of silicon nanoclusters ncl Si in crystalline (c SiO 2 ) and amorphous (a SiO x :H) matrices are reviewed. The effect of radio fre quency (RF) and direct current (dc) discharge modulation on the growth kinetics of ncl Si is considered. The results of infrared spectroscopy, mass spectrometry, and laser beam scanning of the plasma composition are analyzed. The behavior of nanoparticles is described depending on their charge and size in plasma under the effect of electric, magnetic, and gravity forces and under the influence of the dynamics of gases contained within the plasma. Infrared spectroscopy data on the a SiO x :H film matrix are analyzed. The photolumines cence properties of ncl Si fabricated using different techniques are described.
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