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A choice of sensitive element material for uncooled microbolometric array dependents on the ultimate array parameters to a great extent. This paper presents the results of studies of sandwich and planar bolometric structures based on aSi:H and v02 films accordingly. The aSi:H films were fabricated by plasmachenucal vapor-phase deposition and V02 films were prepared by reactive magnetron ion-plasma sputtering. Sandwich structures with area lOOx 100 pm have a resistance of 20 kf and temperature coefficient of resistance (TCR) of 2°/1K at 25 °C. Planar structures with operating section dimensions of 100x70 tm have TCR of 2.9 %/( at the same resistance. The methods of contact noise reduction are found for both type structures. Sandwiches constructed to act as an optical cavity absorb 80% of radiation at 8 tm wavelength. It is shown that the planar structures absorption of 50-80% can be reached in the 8.5-10 tm band.

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