Uncooled membrane-type linear microbolometer array based on a VOx film

Zerov, V. Yu.; Malyarov, V. G.; Khrebtov, I. A.; Kulikov, Yu. V.; Shaganov, I. I.; Smirnov, A. D.

doi:10.1364/jot.68.000428

Cited by 12 publications

(5 citation statements)

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“…Another problem with current microbolometers is that thin films of these materials are non-uniform and amorphous, leading to high 1/f noise. 5,6 The overall quality of a material as a bolometer is typically represented by the noise equivalent temperature (NET). Achieving high TCR and minimizing NET is the primary goal when searching for new bolometric materials.…”

Section: Introductionmentioning

confidence: 99%

Metal-insulator transition in doped Ca2RuO4: Potential application in bolometric detection

Fobes

Vehstedt

Jin

et al. 2012

Journal of Applied Physics

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Temperature induced delocalization of charge carriers and metallic phase in Co0.6Sn0.4Fe2O4 nanoparticles J. Appl. Phys. 112, 063718 (2012) Negligible carrier freeze-out facilitated by impurity band conduction in highly p-type GaN Appl. Phys. Lett. 101, 082106 (2012) Anderson localization in strongly coupled gold-nanoparticle assemblies near the metal-insulator transition Appl. Phys. Lett. 101, 083105 (2012) Epitaxial growth and metal-insulator transition of vanadium oxide thin films with controllable phases Appl. Phys. Lett. 101, 071902 (2012) Relationship between variable range hopping transport and carrier density of amorphous In2O3-10wt. % ZnO thin filmsWe report that the first-order metal-insulator (MI) transition in perovskite ruthenate Ca 2 RuO 4 can be tuned to a nearly second order transition with the transition temperature close to room temperature via Sr, Ti, and Fe chemical doping. The resistivity near this transition ranges from 10 À2 À 10 À1 X-cm. The maximum temperature coefficient of resistance TCR(¼ À(1/R)dR/dT near the transition exceeds 0.4 K À1 . This MI transition can also be tuned by a relatively small biascurrent. These properties suggest that doped calcium ruthenates can be considered an alternative material for improving upon existing bolometric technologies. V C 2012 American Institute of Physics. [http://dx.

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Section: Introductionmentioning

confidence: 99%

Metal-insulator transition in doped Ca2RuO4: Potential application in bolometric detection

Fobes

Vehstedt

Jin

et al. 2012

Journal of Applied Physics

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“…Actual materials used for the fabrication of uncooled resistive bolometers are amorphous semiconductors, polycrystalline SiGe, semiconducting YBa2Cu3O7 (YBCO), VO2 and VOx. Around 300 K they present typical maximum temperature coefficient of the resistance (TCR), defined as the relative resistance derivative (1/R)×(dR/dT), of 0.02 to 0.06 K -1 [3,4], -0.007 K -1 [5], -0.029 K -1 [6], -0.017 K -1 [7,8] and -0.033 K -1 [9], respectively.…”

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confidence: 99%

Uncooled bolometer response of a low noise La2∕3Sr1∕3MnO3 thin film

Méchin

Routoure

Guillet

et al. 2005

Applied Physics Letters

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We report measurements of the optical responses of a La2/3Sr1/3MnO3 (LSMO) sample at a wavelength of 533 nm in the 300 -400 K range. The 200 nm thick film was grown by pulsed laser deposition on (100) SrTiO3 substrate and showed remarkably low noise. At 335 K the temperature coefficient of the resistance of a 100 µm wide 300 µm long LSMO line was 0.017 K -1 and the normalized Hooge parameter was 9×10 -30 m 3 , which is among the lowest reported values. We then measured an optical sensitivity at I = 5 mA of 10.4 V.W -1 and corresponding noise equivalent power (NEP) values of 8.1×10 -10 W.Hz -1/2 and 3.3×10 -10 W.Hz -1/2 at 30 Hz and above 1 kHz, respectively. Simple considerations on bias current conditions and thermal conductance G are finally given for further sensitivity improvements using LSMO films.The performances were indeed demonstrated on bulk substrates with G of 10 -3 W.K -1 . One could expect a NEP reduction by three orders of magnitude if a membrane-type geometry was used, which makes this LSMO device competitive against commercially available uncooled bolometers.Submitted to Appl. Phys. Lett. 1The remarkable electronic and magnetic properties of rare-earth manganite oxides have raised lot of interests for applications [1]. In addition to the widely studied magnetoresistive sensors and spin electronics, uncooled bolometers using the large resistance change at the metal-to-insulator transition are among the most promising. Indeed uncooled technologies open new opportunities for infrared detection for both military and commercial applications [2]. Actual materials used for the fabrication of uncooled resistive bolometers are amorphous semiconductors, polycrystalline SiGe, semiconducting YBa2Cu3O7 (YBCO), VO2 and VOx. Around 300 K they present typical maximum temperature coefficient of the resistance (TCR), defined as the relative resistance derivative (1/R)×(dR/dT), of 0.02 to 0.06 K -1 [3, 4], -0.007 K -1 [5], -0.029 K -1 [6], -0.017 K -1 [7, 8] and -0.033 K -1 [9], respectively.Rajeswari et al. [10] showed that the optical response of La0.67Ca0.33MnO3 was of thermal nature, but the maximum of the resistance derivative (corresponding to TCR = 0.079 K -1 ) was obtained at 260 K. Goyal et al. [11] mentioned the high TCR values of several compositions of manganites. The highest values (0.2 K -1 ) were obtained in Nd0.7Sr0.3MnO3 well below room temperature (235 K). Only La0.7Sr0.3MnO3 and La0.7Ba0.3MnO3 that showed TCR of 0.02 K -1 and 0.04 K -1 , respectively, were suitable for uncooled operation. Other manganite compositions such as La2/3(Ca,Pb)1/3MnO3 [12] and (La0.6Pr0.4)0.67Ca0.33MnO3 [13] even showed TCR as high as 0.1 K -1 at 300 K. However no noise data are available for the first material and preliminary measurements showing a high low frequency noise level are reported for the second one. In comparison TCR of La0.5Ba0.5MnO3 and La0.5Sr0.5MnO3 were lower (about 0.015-0.02 K -1 ) but with a much lower noise level at 30 Hz, which makes them potentially more suitable for uncooled bolometer fabricati...

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“…2E . Compared with previous microbridge ( 18 , 19 ) and pellicle-supported ( 7 , 30 ) structures, the fabrication process of tubular structure is simpler and costless (figs. S7 and S8).…”

Section: Resultsmentioning

confidence: 99%

“…Uncooled infrared detection technology is increasingly being developed to meet the portability of daily monitoring and the capability for various application scenarios. To achieve high sensitivity and intensity, uncooled infrared detectors comprise a heat-sensitive suspended layer or structure on a wafer with excellent thermal insulation and enhanced signal collection ( 7 ). Advances in microfabrication technology have enabled the manufacture of uncooled infrared thermal detectors with various structures such as cantilever ( 8 , 9 ) and antennas ( 10 , 11 ), in addition to the established pellicle-supported and microbridge structures.…”

Section: Introductionmentioning

confidence: 99%

One-step rolling fabrication of VO ₂ tubular bolometers with polarization-sensitive and omnidirectional detection

Wu,

Zhang,

Chen

et al. 2023

Sci. Adv.

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Uncooled infrared detection based on vanadium dioxide (VO 2 ) radiometer is highly demanded in temperature monitoring and security protection. The key to its breakthrough is to fabricate bolometer arrays with great absorbance and excellent thermal insulation using a straightforward procedure. Here, we show a tubular bolometer by one-step rolling VO 2 nanomembranes with enhanced infrared detection. The tubular geometry enhances the thermal insulation, light absorption, and temperature sensitivity of freestanding VO 2 nanomembranes. This tubular VO 2 bolometer exhibits a detectivity of ~2 × 10 8 cm Hz 1/2 W −1 in the ultrabroad infrared spectrum, a response time of ~2.0 ms, and a calculated noise-equivalent temperature difference of 64.5 mK. Furthermore, our device presents a workable structural paradigm for polarization-sensitive and omnidirectional light coupling bolometers. The demonstrated overall characteristics suggest that tubular bolometers have the potential to narrow performance and cost gap between photon detectors and thermal detectors with low cost and broad applications.

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Uncooled membrane-type linear microbolometer array based on a VOx film

Cited by 12 publications

References 0 publications

Metal-insulator transition in doped Ca2RuO4: Potential application in bolometric detection

Metal-insulator transition in doped Ca2RuO4: Potential application in bolometric detection

Uncooled bolometer response of a low noise La2∕3Sr1∕3MnO3 thin film

One-step rolling fabrication of VO ₂ tubular bolometers with polarization-sensitive and omnidirectional detection

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Uncooled membrane-type linear microbolometer array based on a VOx film

Cited by 12 publications

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Metal-insulator transition in doped Ca2RuO4: Potential application in bolometric detection

Metal-insulator transition in doped Ca2RuO4: Potential application in bolometric detection

Uncooled bolometer response of a low noise La2∕3Sr1∕3MnO3 thin film

One-step rolling fabrication of VO 2 tubular bolometers with polarization-sensitive and omnidirectional detection

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One-step rolling fabrication of VO ₂ tubular bolometers with polarization-sensitive and omnidirectional detection