“…These microbolometers are of interest in IR imaging for defence and space applications [1,2]. So far, several materials, apart from thin films of vanadium oxide [3][4][5][6][7][8][9][10][11], have been studied as a sensing element for bolometers, such as metal films [12] and semiconductors, for example, YBaCuO [2,13] and Si-Ge alloys [14]; among them, VO x thin films have shown considerable promise.…”