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We describe a method for charging atomic vapor cells with cesium and buffer gas. By this, it is possible to adjust the buffer gas pressure in the cells with good accuracy. Furthermore, we present a new design of microfabricated vapor cell arrays, which combine silicon wafer based microfabrication and ultrasonic machining to achieve the arrays of thermally separated cells with 50 mm(3) volume. With cells fabricated in the outlined way, intrinsic magnetic field sensitivities down to 300 fT∕Hz(1∕2) are reached.

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