PACS 78.20.Ls, 85.70.Sq Thin films of Yttrium Iron Garnet (YIG) are grown by radio frequency magnetron non reactive sputtering system on quartz and Gadolinium Gallium Garnet (GGG) for optical applications or alumina substrates for microwave applications. A post deposition annealing is needed to obtain the crystallization of YIG films and the magnetic properties which are correlated with the magneto-optical properties. Their crystallographic, morphologic and magnetic properties are explored. The variation of Faraday rotation is studied versus the wavelength. For both optical substrates, quartz and GGG, results are comparable with the literature for bulk material. A microwave isolator was realized with YIG thin film on alumina substrate in a coplanar configuration.
The development of integrated passive components (isolators, circulators) in the microwaves domain and particularly for the communications constitute a stake for the future years. The preparation of these components requires the deposition of ferrimagnetic thin films of some µm thickness. The characterisation methods described in the literature are well adapted on films having high permeability. The measurement loop, surrounding the film with its substrate, is sensitive to the contribution of both media. We suggest here a new technique of inductive measure considering only the characteristics of the deposited films that is surrounded alone by the measurement loop. This technique has been validated on a larger scale, preliminary measurements on thin films of barium hexaferrite and yttrium iron garnet have permitted us to establish an experimental protocol precising the limits of validity of the chosen method.
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